11/24/2010	9:13:50 AM	Recipe started at 9:13 AM
11/24/2010	9:13:50 AM	Helium valve closed
11/24/2010	9:13:50 AM	BCl3 valve closed
11/24/2010	9:13:50 AM	PH3 valve closed
11/24/2010	9:13:50 AM	SiCl4 pre valve closed
11/24/2010	9:13:50 AM	SiCl4 post valve closed
11/24/2010	9:13:50 AM	Main Vac valve closed
11/24/2010	9:13:50 AM	Bypass valve closed
11/24/2010	9:13:50 AM	Bubbler valve closed
11/24/2010	9:13:50 AM	H2 valve opened
11/24/2010	9:13:50 AM	Helium MFC set to  0.000000
11/24/2010	9:13:50 AM	H2 MFC set to  500.000000
11/24/2010	9:13:50 AM	BCl3 MFC set to  0.000000
11/24/2010	9:13:50 AM	PHl3 MFC set to  0.000000
11/24/2010	9:13:50 AM	SiCl4 MFC set to  0.000000
11/24/2010	9:13:50 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	9:13:50 AM	Tube furnace set to 0
11/24/2010	9:15:13 AM	Helium valve closed
11/24/2010	9:15:13 AM	BCl3 valve closed
11/24/2010	9:15:13 AM	PH3 valve closed
11/24/2010	9:15:13 AM	SiCl4 pre valve closed
11/24/2010	9:15:13 AM	SiCl4 post valve closed
11/24/2010	9:15:13 AM	Main Vac valve closed
11/24/2010	9:15:13 AM	Bypass valve closed
11/24/2010	9:15:13 AM	H2 valve opened
11/24/2010	9:15:13 AM	Bubbler valve opened
11/24/2010	9:15:13 AM	Helium MFC set to  0.000000
11/24/2010	9:15:13 AM	H2 MFC set to  500.000000
11/24/2010	9:15:13 AM	BCl3 MFC set to  0.000000
11/24/2010	9:15:13 AM	PHl3 MFC set to  0.000000
11/24/2010	9:15:13 AM	SiCl4 MFC set to  0.000000
11/24/2010	9:15:13 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	9:15:13 AM	Tube furnace set to 1000
11/24/2010	9:35:13 AM	Helium valve closed
11/24/2010	9:35:13 AM	PH3 valve closed
11/24/2010	9:35:13 AM	Main Vac valve closed
11/24/2010	9:35:13 AM	Bypass valve closed
11/24/2010	9:35:13 AM	H2 valve opened
11/24/2010	9:35:13 AM	BCl3 valve opened
11/24/2010	9:35:13 AM	SiCl4 pre valve opened
11/24/2010	9:35:13 AM	SiCl4 post valve opened
11/24/2010	9:35:13 AM	Bubbler valve opened
11/24/2010	9:35:13 AM	Helium MFC set to  0.000000
11/24/2010	9:35:13 AM	H2 MFC set to  500.000000
11/24/2010	9:35:13 AM	BCl3 MFC set to  12.000000
11/24/2010	9:35:13 AM	PHl3 MFC set to  0.000000
11/24/2010	9:35:13 AM	SiCl4 MFC set to  50.000000
11/24/2010	9:35:13 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	9:35:13 AM	Tube furnace set to 1000
11/24/2010	9:50:13 AM	H2 valve closed
11/24/2010	9:50:13 AM	BCl3 valve closed
11/24/2010	9:50:13 AM	PH3 valve closed
11/24/2010	9:50:13 AM	SiCl4 pre valve closed
11/24/2010	9:50:13 AM	SiCl4 post valve closed
11/24/2010	9:50:13 AM	Main Vac valve closed
11/24/2010	9:50:13 AM	Bypass valve closed
11/24/2010	9:50:13 AM	Helium valve opened
11/24/2010	9:50:13 AM	Bubbler valve opened
11/24/2010	9:50:13 AM	Helium MFC set to  500.000000
11/24/2010	9:50:13 AM	H2 MFC set to  0.000000
11/24/2010	9:50:13 AM	BCl3 MFC set to  0.000000
11/24/2010	9:50:13 AM	PHl3 MFC set to  0.000000
11/24/2010	9:50:13 AM	SiCl4 MFC set to  0.000000
11/24/2010	9:50:13 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	9:50:13 AM	Tube furnace set to 950
11/24/2010	9:55:13 AM	H2 valve closed
11/24/2010	9:55:13 AM	BCl3 valve closed
11/24/2010	9:55:13 AM	PH3 valve closed
11/24/2010	9:55:13 AM	SiCl4 pre valve closed
11/24/2010	9:55:13 AM	SiCl4 post valve closed
11/24/2010	9:55:13 AM	Main Vac valve closed
11/24/2010	9:55:13 AM	Bypass valve closed
11/24/2010	9:55:13 AM	Helium valve opened
11/24/2010	9:55:13 AM	Bubbler valve opened
11/24/2010	9:55:13 AM	Helium MFC set to  500.000000
11/24/2010	9:55:13 AM	H2 MFC set to  0.000000
11/24/2010	9:55:13 AM	BCl3 MFC set to  0.000000
11/24/2010	9:55:13 AM	PHl3 MFC set to  0.000000
11/24/2010	9:55:13 AM	SiCl4 MFC set to  0.000000
11/24/2010	9:55:13 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	9:55:13 AM	Tube furnace set to 900
11/24/2010	10:00:13 AM	H2 valve closed
11/24/2010	10:00:13 AM	BCl3 valve closed
11/24/2010	10:00:13 AM	PH3 valve closed
11/24/2010	10:00:13 AM	SiCl4 pre valve closed
11/24/2010	10:00:13 AM	SiCl4 post valve closed
11/24/2010	10:00:13 AM	Main Vac valve closed
11/24/2010	10:00:13 AM	Bypass valve closed
11/24/2010	10:00:13 AM	Helium valve opened
11/24/2010	10:00:13 AM	Bubbler valve opened
11/24/2010	10:00:13 AM	Helium MFC set to  500.000000
11/24/2010	10:00:13 AM	H2 MFC set to  0.000000
11/24/2010	10:00:13 AM	BCl3 MFC set to  0.000000
11/24/2010	10:00:13 AM	PHl3 MFC set to  0.000000
11/24/2010	10:00:13 AM	SiCl4 MFC set to  0.000000
11/24/2010	10:00:13 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	10:00:14 AM	Tube furnace set to 850
11/24/2010	10:05:14 AM	H2 valve closed
11/24/2010	10:05:14 AM	BCl3 valve closed
11/24/2010	10:05:14 AM	PH3 valve closed
11/24/2010	10:05:14 AM	SiCl4 pre valve closed
11/24/2010	10:05:14 AM	SiCl4 post valve closed
11/24/2010	10:05:14 AM	Main Vac valve closed
11/24/2010	10:05:14 AM	Bypass valve closed
11/24/2010	10:05:14 AM	Helium valve opened
11/24/2010	10:05:14 AM	Bubbler valve opened
11/24/2010	10:05:14 AM	Helium MFC set to  500.000000
11/24/2010	10:05:14 AM	H2 MFC set to  0.000000
11/24/2010	10:05:14 AM	BCl3 MFC set to  0.000000
11/24/2010	10:05:14 AM	PHl3 MFC set to  0.000000
11/24/2010	10:05:14 AM	SiCl4 MFC set to  0.000000
11/24/2010	10:05:14 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	10:05:14 AM	Tube furnace set to 800
11/24/2010	10:10:14 AM	H2 valve closed
11/24/2010	10:10:14 AM	BCl3 valve closed
11/24/2010	10:10:14 AM	PH3 valve closed
11/24/2010	10:10:14 AM	SiCl4 pre valve closed
11/24/2010	10:10:14 AM	SiCl4 post valve closed
11/24/2010	10:10:14 AM	Main Vac valve closed
11/24/2010	10:10:14 AM	Bypass valve closed
11/24/2010	10:10:14 AM	Helium valve opened
11/24/2010	10:10:14 AM	Bubbler valve opened
11/24/2010	10:10:14 AM	Helium MFC set to  500.000000
11/24/2010	10:10:14 AM	H2 MFC set to  0.000000
11/24/2010	10:10:14 AM	BCl3 MFC set to  0.000000
11/24/2010	10:10:14 AM	PHl3 MFC set to  0.000000
11/24/2010	10:10:14 AM	SiCl4 MFC set to  0.000000
11/24/2010	10:10:14 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	10:10:14 AM	Tube furnace set to 750
11/24/2010	10:15:14 AM	H2 valve closed
11/24/2010	10:15:14 AM	BCl3 valve closed
11/24/2010	10:15:14 AM	PH3 valve closed
11/24/2010	10:15:14 AM	SiCl4 pre valve closed
11/24/2010	10:15:14 AM	SiCl4 post valve closed
11/24/2010	10:15:14 AM	Main Vac valve closed
11/24/2010	10:15:14 AM	Bypass valve closed
11/24/2010	10:15:14 AM	Helium valve opened
11/24/2010	10:15:14 AM	Bubbler valve opened
11/24/2010	10:15:14 AM	Helium MFC set to  500.000000
11/24/2010	10:15:14 AM	H2 MFC set to  0.000000
11/24/2010	10:15:14 AM	BCl3 MFC set to  0.000000
11/24/2010	10:15:14 AM	PHl3 MFC set to  0.000000
11/24/2010	10:15:14 AM	SiCl4 MFC set to  0.000000
11/24/2010	10:15:14 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	10:15:14 AM	Tube furnace set to 700
11/24/2010	10:17:28 AM	H2 valve closed
11/24/2010	10:17:28 AM	BCl3 valve closed
11/24/2010	10:17:28 AM	PH3 valve closed
11/24/2010	10:17:28 AM	SiCl4 pre valve closed
11/24/2010	10:17:28 AM	SiCl4 post valve closed
11/24/2010	10:17:28 AM	Main Vac valve closed
11/24/2010	10:17:28 AM	Bypass valve closed
11/24/2010	10:17:28 AM	Helium valve opened
11/24/2010	10:17:28 AM	Bubbler valve opened
11/24/2010	10:17:28 AM	Helium MFC set to  500.000000
11/24/2010	10:17:28 AM	H2 MFC set to  0.000000
11/24/2010	10:17:28 AM	BCl3 MFC set to  0.000000
11/24/2010	10:17:28 AM	PHl3 MFC set to  0.000000
11/24/2010	10:17:28 AM	SiCl4 MFC set to  0.000000
11/24/2010	10:17:28 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	10:17:28 AM	Tube furnace set to 0
11/24/2010	10:37:28 AM	Helium valve closed
11/24/2010	10:37:28 AM	H2 valve closed
11/24/2010	10:37:28 AM	BCl3 valve closed
11/24/2010	10:37:28 AM	PH3 valve closed
11/24/2010	10:37:28 AM	SiCl4 pre valve closed
11/24/2010	10:37:28 AM	SiCl4 post valve closed
11/24/2010	10:37:28 AM	Main Vac valve closed
11/24/2010	10:37:28 AM	Bypass valve closed
11/24/2010	10:37:28 AM	Bubbler valve closed
11/24/2010	10:37:28 AM	Helium MFC set to  0.000000
11/24/2010	10:37:28 AM	H2 MFC set to  0.000000
11/24/2010	10:37:28 AM	BCl3 MFC set to  0.000000
11/24/2010	10:37:28 AM	PHl3 MFC set to  0.000000
11/24/2010	10:37:28 AM	SiCl4 MFC set to  0.000000
11/24/2010	10:37:28 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	10:37:29 AM	Tube furnace set to 0
11/24/2010	10:37:29 AM	Run finished at 10:37 AM
11/24/2010	11:09:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/24/2010	11:09:29 AM	Recipe started at 11:09 AM
11/24/2010	11:09:29 AM	H2 valve closed
11/24/2010	11:09:29 AM	BCl3 valve closed
11/24/2010	11:09:29 AM	PH3 valve closed
11/24/2010	11:09:29 AM	SiCl4 pre valve closed
11/24/2010	11:09:29 AM	SiCl4 post valve closed
11/24/2010	11:09:29 AM	Main Vac valve closed
11/24/2010	11:09:29 AM	Bypass valve closed
11/24/2010	11:09:29 AM	Bubbler valve closed
11/24/2010	11:09:29 AM	Helium valve opened
11/24/2010	11:09:29 AM	Helium MFC set to  500.000000
11/24/2010	11:09:29 AM	H2 MFC set to  0.000000
11/24/2010	11:09:29 AM	BCl3 MFC set to  0.000000
11/24/2010	11:09:29 AM	PHl3 MFC set to  0.000000
11/24/2010	11:09:29 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:09:29 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:09:29 AM	Tube furnace set to 0
11/24/2010	11:09:30 AM	Helium valve closed
11/24/2010	11:09:30 AM	H2 valve closed
11/24/2010	11:09:30 AM	BCl3 valve closed
11/24/2010	11:09:30 AM	PH3 valve closed
11/24/2010	11:09:30 AM	SiCl4 pre valve closed
11/24/2010	11:09:30 AM	SiCl4 post valve closed
11/24/2010	11:09:30 AM	Main Vac valve closed
11/24/2010	11:09:30 AM	Bypass valve closed
11/24/2010	11:09:30 AM	Bubbler valve closed
11/24/2010	11:09:30 AM	Helium MFC set to  0.000000
11/24/2010	11:09:30 AM	H2 MFC set to  0.000000
11/24/2010	11:09:30 AM	BCl3 MFC set to  0.000000
11/24/2010	11:09:30 AM	PHl3 MFC set to  0.000000
11/24/2010	11:09:30 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:09:30 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:09:30 AM	Tube furnace set to 0
11/24/2010	11:09:30 AM	Run finished at 11:09 AM
11/24/2010	11:09:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/24/2010	11:12:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/24/2010	11:12:38 AM	Recipe started at 11:12 AM
11/24/2010	11:12:38 AM	Helium valve closed
11/24/2010	11:12:38 AM	H2 valve closed
11/24/2010	11:12:38 AM	BCl3 valve closed
11/24/2010	11:12:38 AM	PH3 valve closed
11/24/2010	11:12:38 AM	SiCl4 pre valve closed
11/24/2010	11:12:38 AM	SiCl4 post valve closed
11/24/2010	11:12:38 AM	Main Vac valve closed
11/24/2010	11:12:38 AM	Bubbler valve closed
11/24/2010	11:12:38 AM	Bypass valve opened
11/24/2010	11:12:38 AM	Helium MFC set to  0.000000
11/24/2010	11:12:38 AM	H2 MFC set to  0.000000
11/24/2010	11:12:38 AM	BCl3 MFC set to  0.000000
11/24/2010	11:12:38 AM	PHl3 MFC set to  0.000000
11/24/2010	11:12:38 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:12:38 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:12:38 AM	Tube furnace set to 0
11/24/2010	11:13:33 AM	Helium valve closed
11/24/2010	11:13:33 AM	H2 valve closed
11/24/2010	11:13:33 AM	BCl3 valve closed
11/24/2010	11:13:33 AM	PH3 valve closed
11/24/2010	11:13:33 AM	SiCl4 pre valve closed
11/24/2010	11:13:33 AM	SiCl4 post valve closed
11/24/2010	11:13:33 AM	Bubbler valve closed
11/24/2010	11:13:33 AM	Main Vac valve opened
11/24/2010	11:13:33 AM	Bypass valve opened
11/24/2010	11:13:33 AM	Helium MFC set to  0.000000
11/24/2010	11:13:33 AM	H2 MFC set to  0.000000
11/24/2010	11:13:33 AM	BCl3 MFC set to  0.000000
11/24/2010	11:13:33 AM	PHl3 MFC set to  0.000000
11/24/2010	11:13:33 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:13:33 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:13:33 AM	Tube furnace set to 0
11/24/2010	11:14:33 AM	H2 valve closed
11/24/2010	11:14:33 AM	BCl3 valve closed
11/24/2010	11:14:33 AM	PH3 valve closed
11/24/2010	11:14:33 AM	SiCl4 pre valve closed
11/24/2010	11:14:33 AM	SiCl4 post valve closed
11/24/2010	11:14:33 AM	Bubbler valve closed
11/24/2010	11:14:33 AM	Helium valve opened
11/24/2010	11:14:33 AM	Main Vac valve opened
11/24/2010	11:14:33 AM	Bypass valve opened
11/24/2010	11:14:33 AM	Helium MFC set to  100.000000
11/24/2010	11:14:33 AM	H2 MFC set to  0.000000
11/24/2010	11:14:33 AM	BCl3 MFC set to  0.000000
11/24/2010	11:14:33 AM	PHl3 MFC set to  0.000000
11/24/2010	11:14:33 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:14:33 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:14:33 AM	Tube furnace set to 0
11/24/2010	11:15:33 AM	Helium valve closed
11/24/2010	11:15:33 AM	H2 valve closed
11/24/2010	11:15:33 AM	BCl3 valve closed
11/24/2010	11:15:33 AM	PH3 valve closed
11/24/2010	11:15:33 AM	SiCl4 pre valve closed
11/24/2010	11:15:33 AM	SiCl4 post valve closed
11/24/2010	11:15:33 AM	Bubbler valve closed
11/24/2010	11:15:33 AM	Main Vac valve opened
11/24/2010	11:15:33 AM	Bypass valve opened
11/24/2010	11:15:33 AM	Helium MFC set to  0.000000
11/24/2010	11:15:33 AM	H2 MFC set to  0.000000
11/24/2010	11:15:33 AM	BCl3 MFC set to  0.000000
11/24/2010	11:15:33 AM	PHl3 MFC set to  0.000000
11/24/2010	11:15:33 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:15:33 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:15:33 AM	Tube furnace set to 0
11/24/2010	11:16:33 AM	H2 valve closed
11/24/2010	11:16:33 AM	BCl3 valve closed
11/24/2010	11:16:33 AM	PH3 valve closed
11/24/2010	11:16:33 AM	SiCl4 pre valve closed
11/24/2010	11:16:33 AM	SiCl4 post valve closed
11/24/2010	11:16:33 AM	Bubbler valve closed
11/24/2010	11:16:33 AM	Helium valve opened
11/24/2010	11:16:33 AM	Main Vac valve opened
11/24/2010	11:16:33 AM	Bypass valve opened
11/24/2010	11:16:33 AM	Helium MFC set to  100.000000
11/24/2010	11:16:33 AM	H2 MFC set to  0.000000
11/24/2010	11:16:33 AM	BCl3 MFC set to  0.000000
11/24/2010	11:16:33 AM	PHl3 MFC set to  0.000000
11/24/2010	11:16:33 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:16:33 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:16:33 AM	Tube furnace set to 0
11/24/2010	11:17:33 AM	Helium valve closed
11/24/2010	11:17:33 AM	H2 valve closed
11/24/2010	11:17:33 AM	BCl3 valve closed
11/24/2010	11:17:33 AM	PH3 valve closed
11/24/2010	11:17:33 AM	SiCl4 pre valve closed
11/24/2010	11:17:33 AM	SiCl4 post valve closed
11/24/2010	11:17:33 AM	Bubbler valve closed
11/24/2010	11:17:33 AM	Main Vac valve opened
11/24/2010	11:17:33 AM	Bypass valve opened
11/24/2010	11:17:33 AM	Helium MFC set to  0.000000
11/24/2010	11:17:33 AM	H2 MFC set to  0.000000
11/24/2010	11:17:33 AM	BCl3 MFC set to  0.000000
11/24/2010	11:17:33 AM	PHl3 MFC set to  0.000000
11/24/2010	11:17:33 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:17:33 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:17:34 AM	Tube furnace set to 0
11/24/2010	11:17:34 AM	H2 valve closed
11/24/2010	11:17:34 AM	BCl3 valve closed
11/24/2010	11:17:34 AM	PH3 valve closed
11/24/2010	11:17:34 AM	SiCl4 pre valve closed
11/24/2010	11:17:34 AM	SiCl4 post valve closed
11/24/2010	11:17:34 AM	Bubbler valve closed
11/24/2010	11:17:34 AM	Helium valve opened
11/24/2010	11:17:34 AM	Main Vac valve opened
11/24/2010	11:17:34 AM	Bypass valve opened
11/24/2010	11:17:34 AM	Helium MFC set to  100.000000
11/24/2010	11:17:34 AM	H2 MFC set to  0.000000
11/24/2010	11:17:34 AM	BCl3 MFC set to  0.000000
11/24/2010	11:17:34 AM	PHl3 MFC set to  0.000000
11/24/2010	11:17:34 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:17:34 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:17:34 AM	Tube furnace set to 0
11/24/2010	11:17:39 AM	Helium valve closed
11/24/2010	11:17:39 AM	H2 valve closed
11/24/2010	11:17:39 AM	BCl3 valve closed
11/24/2010	11:17:39 AM	PH3 valve closed
11/24/2010	11:17:39 AM	SiCl4 pre valve closed
11/24/2010	11:17:39 AM	SiCl4 post valve closed
11/24/2010	11:17:39 AM	Bubbler valve closed
11/24/2010	11:17:39 AM	Main Vac valve opened
11/24/2010	11:17:39 AM	Bypass valve opened
11/24/2010	11:17:39 AM	Helium MFC set to  0.000000
11/24/2010	11:17:39 AM	H2 MFC set to  0.000000
11/24/2010	11:17:39 AM	BCl3 MFC set to  0.000000
11/24/2010	11:17:39 AM	PHl3 MFC set to  0.000000
11/24/2010	11:17:39 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:17:39 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:17:39 AM	Tube furnace set to 0
11/24/2010	11:18:39 AM	H2 valve closed
11/24/2010	11:18:39 AM	BCl3 valve closed
11/24/2010	11:18:39 AM	PH3 valve closed
11/24/2010	11:18:39 AM	SiCl4 pre valve closed
11/24/2010	11:18:39 AM	SiCl4 post valve closed
11/24/2010	11:18:39 AM	Bubbler valve closed
11/24/2010	11:18:39 AM	Helium valve opened
11/24/2010	11:18:39 AM	Main Vac valve opened
11/24/2010	11:18:39 AM	Bypass valve opened
11/24/2010	11:18:39 AM	Helium MFC set to  100.000000
11/24/2010	11:18:39 AM	H2 MFC set to  0.000000
11/24/2010	11:18:39 AM	BCl3 MFC set to  0.000000
11/24/2010	11:18:39 AM	PHl3 MFC set to  0.000000
11/24/2010	11:18:39 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:18:39 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:18:39 AM	Tube furnace set to 0
11/24/2010	11:19:39 AM	Helium valve closed
11/24/2010	11:19:39 AM	H2 valve closed
11/24/2010	11:19:39 AM	BCl3 valve closed
11/24/2010	11:19:39 AM	PH3 valve closed
11/24/2010	11:19:39 AM	SiCl4 pre valve closed
11/24/2010	11:19:39 AM	SiCl4 post valve closed
11/24/2010	11:19:39 AM	Bubbler valve closed
11/24/2010	11:19:39 AM	Main Vac valve opened
11/24/2010	11:19:39 AM	Bypass valve opened
11/24/2010	11:19:39 AM	Helium MFC set to  0.000000
11/24/2010	11:19:39 AM	H2 MFC set to  0.000000
11/24/2010	11:19:39 AM	BCl3 MFC set to  0.000000
11/24/2010	11:19:39 AM	PHl3 MFC set to  0.000000
11/24/2010	11:19:39 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:19:39 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:19:39 AM	Tube furnace set to 0
11/24/2010	11:20:39 AM	H2 valve closed
11/24/2010	11:20:39 AM	BCl3 valve closed
11/24/2010	11:20:39 AM	PH3 valve closed
11/24/2010	11:20:39 AM	SiCl4 pre valve closed
11/24/2010	11:20:39 AM	SiCl4 post valve closed
11/24/2010	11:20:39 AM	Bubbler valve closed
11/24/2010	11:20:39 AM	Helium valve opened
11/24/2010	11:20:39 AM	Main Vac valve opened
11/24/2010	11:20:39 AM	Bypass valve opened
11/24/2010	11:20:39 AM	Helium MFC set to  100.000000
11/24/2010	11:20:39 AM	H2 MFC set to  0.000000
11/24/2010	11:20:39 AM	BCl3 MFC set to  0.000000
11/24/2010	11:20:39 AM	PHl3 MFC set to  0.000000
11/24/2010	11:20:39 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:20:39 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:20:39 AM	Tube furnace set to 0
11/24/2010	11:21:39 AM	Helium valve closed
11/24/2010	11:21:39 AM	H2 valve closed
11/24/2010	11:21:39 AM	BCl3 valve closed
11/24/2010	11:21:39 AM	PH3 valve closed
11/24/2010	11:21:39 AM	SiCl4 pre valve closed
11/24/2010	11:21:39 AM	SiCl4 post valve closed
11/24/2010	11:21:39 AM	Bubbler valve closed
11/24/2010	11:21:39 AM	Main Vac valve opened
11/24/2010	11:21:39 AM	Bypass valve opened
11/24/2010	11:21:39 AM	Helium MFC set to  0.000000
11/24/2010	11:21:39 AM	H2 MFC set to  0.000000
11/24/2010	11:21:39 AM	BCl3 MFC set to  0.000000
11/24/2010	11:21:39 AM	PHl3 MFC set to  0.000000
11/24/2010	11:21:39 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:21:39 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:21:40 AM	Tube furnace set to 0
11/24/2010	11:22:40 AM	H2 valve closed
11/24/2010	11:22:40 AM	BCl3 valve closed
11/24/2010	11:22:40 AM	PH3 valve closed
11/24/2010	11:22:40 AM	SiCl4 pre valve closed
11/24/2010	11:22:40 AM	SiCl4 post valve closed
11/24/2010	11:22:40 AM	Bubbler valve closed
11/24/2010	11:22:40 AM	Helium valve opened
11/24/2010	11:22:40 AM	Main Vac valve opened
11/24/2010	11:22:40 AM	Bypass valve opened
11/24/2010	11:22:40 AM	Helium MFC set to  100.000000
11/24/2010	11:22:40 AM	H2 MFC set to  0.000000
11/24/2010	11:22:40 AM	BCl3 MFC set to  0.000000
11/24/2010	11:22:40 AM	PHl3 MFC set to  0.000000
11/24/2010	11:22:40 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:22:40 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:22:40 AM	Tube furnace set to 0
11/24/2010	11:23:40 AM	Helium valve closed
11/24/2010	11:23:40 AM	H2 valve closed
11/24/2010	11:23:40 AM	BCl3 valve closed
11/24/2010	11:23:40 AM	PH3 valve closed
11/24/2010	11:23:40 AM	SiCl4 pre valve closed
11/24/2010	11:23:40 AM	SiCl4 post valve closed
11/24/2010	11:23:40 AM	Bubbler valve closed
11/24/2010	11:23:40 AM	Main Vac valve opened
11/24/2010	11:23:40 AM	Bypass valve opened
11/24/2010	11:23:40 AM	Helium MFC set to  0.000000
11/24/2010	11:23:40 AM	H2 MFC set to  0.000000
11/24/2010	11:23:40 AM	BCl3 MFC set to  0.000000
11/24/2010	11:23:40 AM	PHl3 MFC set to  0.000000
11/24/2010	11:23:40 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:23:40 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:23:40 AM	Tube furnace set to 0
11/24/2010	11:24:40 AM	H2 valve closed
11/24/2010	11:24:40 AM	BCl3 valve closed
11/24/2010	11:24:40 AM	PH3 valve closed
11/24/2010	11:24:40 AM	SiCl4 pre valve closed
11/24/2010	11:24:40 AM	SiCl4 post valve closed
11/24/2010	11:24:40 AM	Bubbler valve closed
11/24/2010	11:24:40 AM	Helium valve opened
11/24/2010	11:24:40 AM	Main Vac valve opened
11/24/2010	11:24:40 AM	Bypass valve opened
11/24/2010	11:24:40 AM	Helium MFC set to  100.000000
11/24/2010	11:24:40 AM	H2 MFC set to  0.000000
11/24/2010	11:24:40 AM	BCl3 MFC set to  0.000000
11/24/2010	11:24:40 AM	PHl3 MFC set to  0.000000
11/24/2010	11:24:40 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:24:40 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:24:40 AM	Tube furnace set to 0
11/24/2010	11:25:40 AM	Helium valve closed
11/24/2010	11:25:40 AM	H2 valve closed
11/24/2010	11:25:40 AM	BCl3 valve closed
11/24/2010	11:25:40 AM	PH3 valve closed
11/24/2010	11:25:40 AM	SiCl4 pre valve closed
11/24/2010	11:25:40 AM	SiCl4 post valve closed
11/24/2010	11:25:40 AM	Bubbler valve closed
11/24/2010	11:25:40 AM	Main Vac valve opened
11/24/2010	11:25:40 AM	Bypass valve opened
11/24/2010	11:25:40 AM	Helium MFC set to  0.000000
11/24/2010	11:25:40 AM	H2 MFC set to  0.000000
11/24/2010	11:25:40 AM	BCl3 MFC set to  0.000000
11/24/2010	11:25:40 AM	PHl3 MFC set to  0.000000
11/24/2010	11:25:40 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:25:40 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:25:40 AM	Tube furnace set to 0
11/24/2010	11:26:40 AM	H2 valve closed
11/24/2010	11:26:40 AM	BCl3 valve closed
11/24/2010	11:26:40 AM	PH3 valve closed
11/24/2010	11:26:40 AM	SiCl4 pre valve closed
11/24/2010	11:26:40 AM	SiCl4 post valve closed
11/24/2010	11:26:40 AM	Bubbler valve closed
11/24/2010	11:26:40 AM	Helium valve opened
11/24/2010	11:26:40 AM	Main Vac valve opened
11/24/2010	11:26:40 AM	Bypass valve opened
11/24/2010	11:26:40 AM	Helium MFC set to  100.000000
11/24/2010	11:26:40 AM	H2 MFC set to  0.000000
11/24/2010	11:26:40 AM	BCl3 MFC set to  0.000000
11/24/2010	11:26:40 AM	PHl3 MFC set to  0.000000
11/24/2010	11:26:40 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:26:40 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:26:41 AM	Tube furnace set to 0
11/24/2010	11:27:41 AM	Helium valve closed
11/24/2010	11:27:41 AM	H2 valve closed
11/24/2010	11:27:41 AM	BCl3 valve closed
11/24/2010	11:27:41 AM	PH3 valve closed
11/24/2010	11:27:41 AM	SiCl4 pre valve closed
11/24/2010	11:27:41 AM	SiCl4 post valve closed
11/24/2010	11:27:41 AM	Bubbler valve closed
11/24/2010	11:27:41 AM	Main Vac valve opened
11/24/2010	11:27:41 AM	Bypass valve opened
11/24/2010	11:27:41 AM	Helium MFC set to  0.000000
11/24/2010	11:27:41 AM	H2 MFC set to  0.000000
11/24/2010	11:27:41 AM	BCl3 MFC set to  0.000000
11/24/2010	11:27:41 AM	PHl3 MFC set to  0.000000
11/24/2010	11:27:41 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:27:41 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:27:41 AM	Tube furnace set to 0
11/24/2010	11:28:41 AM	H2 valve closed
11/24/2010	11:28:41 AM	BCl3 valve closed
11/24/2010	11:28:41 AM	PH3 valve closed
11/24/2010	11:28:41 AM	SiCl4 pre valve closed
11/24/2010	11:28:41 AM	SiCl4 post valve closed
11/24/2010	11:28:41 AM	Bubbler valve closed
11/24/2010	11:28:41 AM	Helium valve opened
11/24/2010	11:28:41 AM	Main Vac valve opened
11/24/2010	11:28:41 AM	Bypass valve opened
11/24/2010	11:28:41 AM	Helium MFC set to  100.000000
11/24/2010	11:28:41 AM	H2 MFC set to  0.000000
11/24/2010	11:28:41 AM	BCl3 MFC set to  0.000000
11/24/2010	11:28:41 AM	PHl3 MFC set to  0.000000
11/24/2010	11:28:41 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:28:41 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:28:41 AM	Tube furnace set to 0
11/24/2010	11:29:41 AM	Helium valve closed
11/24/2010	11:29:41 AM	H2 valve closed
11/24/2010	11:29:41 AM	BCl3 valve closed
11/24/2010	11:29:41 AM	PH3 valve closed
11/24/2010	11:29:41 AM	SiCl4 pre valve closed
11/24/2010	11:29:41 AM	SiCl4 post valve closed
11/24/2010	11:29:41 AM	Bubbler valve closed
11/24/2010	11:29:41 AM	Main Vac valve opened
11/24/2010	11:29:41 AM	Bypass valve opened
11/24/2010	11:29:41 AM	Helium MFC set to  0.000000
11/24/2010	11:29:41 AM	H2 MFC set to  0.000000
11/24/2010	11:29:41 AM	BCl3 MFC set to  0.000000
11/24/2010	11:29:41 AM	PHl3 MFC set to  0.000000
11/24/2010	11:29:41 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:29:41 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:29:41 AM	Tube furnace set to 0
11/24/2010	11:30:41 AM	H2 valve closed
11/24/2010	11:30:41 AM	BCl3 valve closed
11/24/2010	11:30:41 AM	PH3 valve closed
11/24/2010	11:30:41 AM	SiCl4 pre valve closed
11/24/2010	11:30:41 AM	SiCl4 post valve closed
11/24/2010	11:30:41 AM	Bubbler valve closed
11/24/2010	11:30:41 AM	Helium valve opened
11/24/2010	11:30:41 AM	Main Vac valve opened
11/24/2010	11:30:41 AM	Bypass valve opened
11/24/2010	11:30:41 AM	Helium MFC set to  100.000000
11/24/2010	11:30:41 AM	H2 MFC set to  0.000000
11/24/2010	11:30:41 AM	BCl3 MFC set to  0.000000
11/24/2010	11:30:41 AM	PHl3 MFC set to  0.000000
11/24/2010	11:30:41 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:30:41 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:30:41 AM	Tube furnace set to 0
11/24/2010	11:31:41 AM	Helium valve closed
11/24/2010	11:31:41 AM	H2 valve closed
11/24/2010	11:31:41 AM	BCl3 valve closed
11/24/2010	11:31:41 AM	PH3 valve closed
11/24/2010	11:31:41 AM	SiCl4 pre valve closed
11/24/2010	11:31:41 AM	SiCl4 post valve closed
11/24/2010	11:31:41 AM	Bubbler valve closed
11/24/2010	11:31:41 AM	Main Vac valve opened
11/24/2010	11:31:41 AM	Bypass valve opened
11/24/2010	11:31:41 AM	Helium MFC set to  0.000000
11/24/2010	11:31:41 AM	H2 MFC set to  0.000000
11/24/2010	11:31:41 AM	BCl3 MFC set to  0.000000
11/24/2010	11:31:41 AM	PHl3 MFC set to  0.000000
11/24/2010	11:31:41 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:31:41 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:31:41 AM	Tube furnace set to 0
11/24/2010	11:31:42 AM	Run finished at 11:31 AM
11/24/2010	11:31:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/24/2010	11:48:19 AM	Helium MFC set to  100.000000
11/24/2010	11:48:19 AM	Helium valve opened
11/24/2010	11:51:16 AM	Helium MFC set to  0.000000
11/24/2010	11:51:17 AM	Helium valve closed
11/24/2010	11:53:28 AM	Recipe started at 11:53 AM
11/24/2010	11:53:28 AM	Helium valve closed
11/24/2010	11:53:28 AM	BCl3 valve closed
11/24/2010	11:53:28 AM	PH3 valve closed
11/24/2010	11:53:28 AM	SiCl4 pre valve closed
11/24/2010	11:53:28 AM	SiCl4 post valve closed
11/24/2010	11:53:28 AM	Main Vac valve closed
11/24/2010	11:53:28 AM	Bypass valve closed
11/24/2010	11:53:28 AM	Bubbler valve closed
11/24/2010	11:53:28 AM	H2 valve opened
11/24/2010	11:53:28 AM	Helium MFC set to  0.000000
11/24/2010	11:53:28 AM	H2 MFC set to  500.000000
11/24/2010	11:53:28 AM	BCl3 MFC set to  0.000000
11/24/2010	11:53:28 AM	PHl3 MFC set to  0.000000
11/24/2010	11:53:28 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:53:28 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:53:28 AM	Tube furnace set to 0
11/24/2010	11:54:50 AM	Helium valve closed
11/24/2010	11:54:50 AM	BCl3 valve closed
11/24/2010	11:54:50 AM	PH3 valve closed
11/24/2010	11:54:50 AM	SiCl4 pre valve closed
11/24/2010	11:54:50 AM	SiCl4 post valve closed
11/24/2010	11:54:50 AM	Main Vac valve closed
11/24/2010	11:54:50 AM	Bypass valve closed
11/24/2010	11:54:50 AM	H2 valve opened
11/24/2010	11:54:50 AM	Bubbler valve opened
11/24/2010	11:54:50 AM	Helium MFC set to  0.000000
11/24/2010	11:54:50 AM	H2 MFC set to  500.000000
11/24/2010	11:54:50 AM	BCl3 MFC set to  0.000000
11/24/2010	11:54:50 AM	PHl3 MFC set to  0.000000
11/24/2010	11:54:50 AM	SiCl4 MFC set to  0.000000
11/24/2010	11:54:50 AM	Bypass solenoid MFC set to  0.000000
11/24/2010	11:54:50 AM	Tube furnace set to 1000
11/24/2010	12:14:50 PM	Helium valve closed
11/24/2010	12:14:50 PM	BCl3 valve closed
11/24/2010	12:14:50 PM	PH3 valve closed
11/24/2010	12:14:50 PM	SiCl4 pre valve closed
11/24/2010	12:14:50 PM	SiCl4 post valve closed
11/24/2010	12:14:50 PM	Main Vac valve closed
11/24/2010	12:14:50 PM	Bypass valve closed
11/24/2010	12:14:50 PM	H2 valve opened
11/24/2010	12:14:50 PM	Bubbler valve opened
11/24/2010	12:14:50 PM	Helium MFC set to  0.000000
11/24/2010	12:14:50 PM	H2 MFC set to  500.000000
11/24/2010	12:14:50 PM	BCl3 MFC set to  0.000000
11/24/2010	12:14:50 PM	PHl3 MFC set to  0.000000
11/24/2010	12:14:50 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:14:50 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:14:50 PM	Tube furnace set to 1000
11/24/2010	12:15:50 PM	Helium valve closed
11/24/2010	12:15:50 PM	BCl3 valve closed
11/24/2010	12:15:50 PM	PH3 valve closed
11/24/2010	12:15:50 PM	SiCl4 pre valve closed
11/24/2010	12:15:50 PM	SiCl4 post valve closed
11/24/2010	12:15:50 PM	Main Vac valve closed
11/24/2010	12:15:50 PM	Bypass valve closed
11/24/2010	12:15:50 PM	H2 valve opened
11/24/2010	12:15:50 PM	Bubbler valve opened
11/24/2010	12:15:50 PM	Helium MFC set to  0.000000
11/24/2010	12:15:50 PM	H2 MFC set to  500.000000
11/24/2010	12:15:50 PM	BCl3 MFC set to  0.000000
11/24/2010	12:15:50 PM	PHl3 MFC set to  0.000000
11/24/2010	12:15:50 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:15:50 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:15:51 PM	Tube furnace set to 0
11/24/2010	12:17:39 PM	Helium valve closed
11/24/2010	12:17:39 PM	H2 valve closed
11/24/2010	12:17:39 PM	BCl3 valve closed
11/24/2010	12:17:39 PM	PH3 valve closed
11/24/2010	12:17:39 PM	SiCl4 pre valve closed
11/24/2010	12:17:39 PM	SiCl4 post valve closed
11/24/2010	12:17:39 PM	Main Vac valve closed
11/24/2010	12:17:39 PM	Bypass valve closed
11/24/2010	12:17:39 PM	Bubbler valve closed
11/24/2010	12:17:39 PM	Helium MFC set to  0.000000
11/24/2010	12:17:39 PM	H2 MFC set to  0.000000
11/24/2010	12:17:39 PM	BCl3 MFC set to  0.000000
11/24/2010	12:17:39 PM	PHl3 MFC set to  0.000000
11/24/2010	12:17:39 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:17:39 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:17:39 PM	Tube furnace set to 0
11/24/2010	12:17:39 PM	Run finished at 12:17 PM
11/24/2010	12:18:56 PM	Recipe started at 12:18 PM
11/24/2010	12:18:56 PM	H2 valve closed
11/24/2010	12:18:56 PM	BCl3 valve closed
11/24/2010	12:18:56 PM	PH3 valve closed
11/24/2010	12:18:56 PM	SiCl4 pre valve closed
11/24/2010	12:18:56 PM	SiCl4 post valve closed
11/24/2010	12:18:56 PM	Main Vac valve closed
11/24/2010	12:18:56 PM	Bypass valve closed
11/24/2010	12:18:56 PM	Bubbler valve closed
11/24/2010	12:18:56 PM	Helium valve opened
11/24/2010	12:18:56 PM	Helium MFC set to  500.000000
11/24/2010	12:18:56 PM	H2 MFC set to  0.000000
11/24/2010	12:18:56 PM	BCl3 MFC set to  0.000000
11/24/2010	12:18:56 PM	PHl3 MFC set to  0.000000
11/24/2010	12:18:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:18:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:18:56 PM	Tube furnace set to 0
11/24/2010	12:19:00 PM	H2 valve closed
11/24/2010	12:19:00 PM	BCl3 valve closed
11/24/2010	12:19:00 PM	PH3 valve closed
11/24/2010	12:19:00 PM	SiCl4 pre valve closed
11/24/2010	12:19:00 PM	SiCl4 post valve closed
11/24/2010	12:19:00 PM	Main Vac valve closed
11/24/2010	12:19:00 PM	Bypass valve closed
11/24/2010	12:19:00 PM	Helium valve opened
11/24/2010	12:19:00 PM	Bubbler valve opened
11/24/2010	12:19:00 PM	Helium MFC set to  500.000000
11/24/2010	12:19:00 PM	H2 MFC set to  0.000000
11/24/2010	12:19:00 PM	BCl3 MFC set to  0.000000
11/24/2010	12:19:00 PM	PHl3 MFC set to  0.000000
11/24/2010	12:19:00 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:19:00 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:19:00 PM	Tube furnace set to 0
11/24/2010	12:20:21 PM	Helium valve closed
11/24/2010	12:20:21 PM	H2 valve closed
11/24/2010	12:20:21 PM	BCl3 valve closed
11/24/2010	12:20:21 PM	PH3 valve closed
11/24/2010	12:20:21 PM	SiCl4 pre valve closed
11/24/2010	12:20:21 PM	SiCl4 post valve closed
11/24/2010	12:20:21 PM	Main Vac valve closed
11/24/2010	12:20:21 PM	Bypass valve closed
11/24/2010	12:20:21 PM	Bubbler valve closed
11/24/2010	12:20:21 PM	Helium MFC set to  0.000000
11/24/2010	12:20:21 PM	H2 MFC set to  0.000000
11/24/2010	12:20:21 PM	BCl3 MFC set to  0.000000
11/24/2010	12:20:21 PM	PHl3 MFC set to  0.000000
11/24/2010	12:20:21 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:20:21 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:20:21 PM	Tube furnace set to 0
11/24/2010	12:20:22 PM	Run finished at 12:20 PM
11/24/2010	12:21:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2010	12:21:32 PM	Recipe started at 12:21 PM
11/24/2010	12:21:32 PM	Helium valve closed
11/24/2010	12:21:32 PM	H2 valve closed
11/24/2010	12:21:32 PM	BCl3 valve closed
11/24/2010	12:21:32 PM	PH3 valve closed
11/24/2010	12:21:32 PM	SiCl4 pre valve closed
11/24/2010	12:21:32 PM	SiCl4 post valve closed
11/24/2010	12:21:32 PM	Main Vac valve closed
11/24/2010	12:21:32 PM	Bubbler valve closed
11/24/2010	12:21:32 PM	Bypass valve opened
11/24/2010	12:21:32 PM	Helium MFC set to  0.000000
11/24/2010	12:21:32 PM	H2 MFC set to  0.000000
11/24/2010	12:21:32 PM	BCl3 MFC set to  0.000000
11/24/2010	12:21:32 PM	PHl3 MFC set to  0.000000
11/24/2010	12:21:32 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:21:32 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:21:32 PM	Tube furnace set to 0
11/24/2010	12:22:13 PM	Helium valve closed
11/24/2010	12:22:13 PM	H2 valve closed
11/24/2010	12:22:13 PM	BCl3 valve closed
11/24/2010	12:22:13 PM	PH3 valve closed
11/24/2010	12:22:13 PM	SiCl4 pre valve closed
11/24/2010	12:22:13 PM	SiCl4 post valve closed
11/24/2010	12:22:13 PM	Bubbler valve closed
11/24/2010	12:22:13 PM	Main Vac valve opened
11/24/2010	12:22:13 PM	Bypass valve opened
11/24/2010	12:22:13 PM	Helium MFC set to  0.000000
11/24/2010	12:22:13 PM	H2 MFC set to  0.000000
11/24/2010	12:22:13 PM	BCl3 MFC set to  0.000000
11/24/2010	12:22:13 PM	PHl3 MFC set to  0.000000
11/24/2010	12:22:13 PM	SiCl4 MFC set to  0.000000
11/24/2010	12:22:13 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	12:22:13 PM	Tube furnace set to 0
11/24/2010	12:22:14 PM	Run finished at 12:22 PM
11/24/2010	12:22:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2010	1:16:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/24/2010	1:16:28 PM	Recipe started at 1:16 PM
11/24/2010	1:16:28 PM	H2 valve closed
11/24/2010	1:16:28 PM	BCl3 valve closed
11/24/2010	1:16:28 PM	PH3 valve closed
11/24/2010	1:16:28 PM	SiCl4 pre valve closed
11/24/2010	1:16:28 PM	SiCl4 post valve closed
11/24/2010	1:16:28 PM	Main Vac valve closed
11/24/2010	1:16:28 PM	Bypass valve closed
11/24/2010	1:16:28 PM	Bubbler valve closed
11/24/2010	1:16:28 PM	Helium valve opened
11/24/2010	1:16:29 PM	Helium MFC set to  500.000000
11/24/2010	1:16:29 PM	H2 MFC set to  0.000000
11/24/2010	1:16:29 PM	BCl3 MFC set to  0.000000
11/24/2010	1:16:29 PM	PHl3 MFC set to  0.000000
11/24/2010	1:16:29 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:16:29 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:16:29 PM	Tube furnace set to 0
11/24/2010	1:17:48 PM	Helium valve closed
11/24/2010	1:17:48 PM	H2 valve closed
11/24/2010	1:17:48 PM	BCl3 valve closed
11/24/2010	1:17:48 PM	PH3 valve closed
11/24/2010	1:17:48 PM	SiCl4 pre valve closed
11/24/2010	1:17:48 PM	SiCl4 post valve closed
11/24/2010	1:17:48 PM	Main Vac valve closed
11/24/2010	1:17:48 PM	Bypass valve closed
11/24/2010	1:17:48 PM	Bubbler valve closed
11/24/2010	1:17:48 PM	Helium MFC set to  0.000000
11/24/2010	1:17:48 PM	H2 MFC set to  0.000000
11/24/2010	1:17:48 PM	BCl3 MFC set to  0.000000
11/24/2010	1:17:48 PM	PHl3 MFC set to  0.000000
11/24/2010	1:17:48 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:17:48 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:17:48 PM	Tube furnace set to 0
11/24/2010	1:17:48 PM	Run finished at 1:17 PM
11/24/2010	1:17:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/24/2010	1:20:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/24/2010	1:20:21 PM	Recipe started at 1:20 PM
11/24/2010	1:20:21 PM	Helium valve closed
11/24/2010	1:20:21 PM	H2 valve closed
11/24/2010	1:20:21 PM	BCl3 valve closed
11/24/2010	1:20:21 PM	PH3 valve closed
11/24/2010	1:20:21 PM	SiCl4 pre valve closed
11/24/2010	1:20:21 PM	SiCl4 post valve closed
11/24/2010	1:20:21 PM	Main Vac valve closed
11/24/2010	1:20:21 PM	Bubbler valve closed
11/24/2010	1:20:21 PM	Bypass valve opened
11/24/2010	1:20:21 PM	Helium MFC set to  0.000000
11/24/2010	1:20:21 PM	H2 MFC set to  0.000000
11/24/2010	1:20:21 PM	BCl3 MFC set to  0.000000
11/24/2010	1:20:21 PM	PHl3 MFC set to  0.000000
11/24/2010	1:20:21 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:20:21 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:20:21 PM	Tube furnace set to 0
11/24/2010	1:21:13 PM	Helium valve closed
11/24/2010	1:21:13 PM	H2 valve closed
11/24/2010	1:21:13 PM	BCl3 valve closed
11/24/2010	1:21:13 PM	PH3 valve closed
11/24/2010	1:21:13 PM	SiCl4 pre valve closed
11/24/2010	1:21:13 PM	SiCl4 post valve closed
11/24/2010	1:21:13 PM	Bubbler valve closed
11/24/2010	1:21:13 PM	Main Vac valve opened
11/24/2010	1:21:13 PM	Bypass valve opened
11/24/2010	1:21:13 PM	Helium MFC set to  0.000000
11/24/2010	1:21:13 PM	H2 MFC set to  0.000000
11/24/2010	1:21:13 PM	BCl3 MFC set to  0.000000
11/24/2010	1:21:13 PM	PHl3 MFC set to  0.000000
11/24/2010	1:21:13 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:21:13 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:21:13 PM	Tube furnace set to 0
11/24/2010	1:22:13 PM	H2 valve closed
11/24/2010	1:22:13 PM	BCl3 valve closed
11/24/2010	1:22:13 PM	PH3 valve closed
11/24/2010	1:22:13 PM	SiCl4 pre valve closed
11/24/2010	1:22:13 PM	SiCl4 post valve closed
11/24/2010	1:22:13 PM	Bubbler valve closed
11/24/2010	1:22:13 PM	Helium valve opened
11/24/2010	1:22:13 PM	Main Vac valve opened
11/24/2010	1:22:13 PM	Bypass valve opened
11/24/2010	1:22:13 PM	Helium MFC set to  100.000000
11/24/2010	1:22:13 PM	H2 MFC set to  0.000000
11/24/2010	1:22:13 PM	BCl3 MFC set to  0.000000
11/24/2010	1:22:13 PM	PHl3 MFC set to  0.000000
11/24/2010	1:22:13 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:22:13 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:22:13 PM	Tube furnace set to 0
11/24/2010	1:23:13 PM	Helium valve closed
11/24/2010	1:23:13 PM	H2 valve closed
11/24/2010	1:23:13 PM	BCl3 valve closed
11/24/2010	1:23:13 PM	PH3 valve closed
11/24/2010	1:23:13 PM	SiCl4 pre valve closed
11/24/2010	1:23:13 PM	SiCl4 post valve closed
11/24/2010	1:23:13 PM	Bubbler valve closed
11/24/2010	1:23:13 PM	Main Vac valve opened
11/24/2010	1:23:13 PM	Bypass valve opened
11/24/2010	1:23:13 PM	Helium MFC set to  0.000000
11/24/2010	1:23:13 PM	H2 MFC set to  0.000000
11/24/2010	1:23:13 PM	BCl3 MFC set to  0.000000
11/24/2010	1:23:13 PM	PHl3 MFC set to  0.000000
11/24/2010	1:23:13 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:23:13 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:23:13 PM	Tube furnace set to 0
11/24/2010	1:24:13 PM	H2 valve closed
11/24/2010	1:24:13 PM	BCl3 valve closed
11/24/2010	1:24:13 PM	PH3 valve closed
11/24/2010	1:24:13 PM	SiCl4 pre valve closed
11/24/2010	1:24:13 PM	SiCl4 post valve closed
11/24/2010	1:24:13 PM	Bubbler valve closed
11/24/2010	1:24:13 PM	Helium valve opened
11/24/2010	1:24:13 PM	Main Vac valve opened
11/24/2010	1:24:13 PM	Bypass valve opened
11/24/2010	1:24:13 PM	Helium MFC set to  100.000000
11/24/2010	1:24:13 PM	H2 MFC set to  0.000000
11/24/2010	1:24:13 PM	BCl3 MFC set to  0.000000
11/24/2010	1:24:13 PM	PHl3 MFC set to  0.000000
11/24/2010	1:24:13 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:24:13 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:24:13 PM	Tube furnace set to 0
11/24/2010	1:25:13 PM	Helium valve closed
11/24/2010	1:25:13 PM	H2 valve closed
11/24/2010	1:25:13 PM	BCl3 valve closed
11/24/2010	1:25:13 PM	PH3 valve closed
11/24/2010	1:25:13 PM	SiCl4 pre valve closed
11/24/2010	1:25:13 PM	SiCl4 post valve closed
11/24/2010	1:25:13 PM	Bubbler valve closed
11/24/2010	1:25:13 PM	Main Vac valve opened
11/24/2010	1:25:13 PM	Bypass valve opened
11/24/2010	1:25:13 PM	Helium MFC set to  0.000000
11/24/2010	1:25:13 PM	H2 MFC set to  0.000000
11/24/2010	1:25:13 PM	BCl3 MFC set to  0.000000
11/24/2010	1:25:13 PM	PHl3 MFC set to  0.000000
11/24/2010	1:25:13 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:25:13 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:25:14 PM	Tube furnace set to 0
11/24/2010	1:26:14 PM	H2 valve closed
11/24/2010	1:26:14 PM	BCl3 valve closed
11/24/2010	1:26:14 PM	PH3 valve closed
11/24/2010	1:26:14 PM	SiCl4 pre valve closed
11/24/2010	1:26:14 PM	SiCl4 post valve closed
11/24/2010	1:26:14 PM	Bubbler valve closed
11/24/2010	1:26:14 PM	Helium valve opened
11/24/2010	1:26:14 PM	Main Vac valve opened
11/24/2010	1:26:14 PM	Bypass valve opened
11/24/2010	1:26:14 PM	Helium MFC set to  100.000000
11/24/2010	1:26:14 PM	H2 MFC set to  0.000000
11/24/2010	1:26:14 PM	BCl3 MFC set to  0.000000
11/24/2010	1:26:14 PM	PHl3 MFC set to  0.000000
11/24/2010	1:26:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:26:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:26:14 PM	Tube furnace set to 0
11/24/2010	1:27:14 PM	Helium valve closed
11/24/2010	1:27:14 PM	H2 valve closed
11/24/2010	1:27:14 PM	BCl3 valve closed
11/24/2010	1:27:14 PM	PH3 valve closed
11/24/2010	1:27:14 PM	SiCl4 pre valve closed
11/24/2010	1:27:14 PM	SiCl4 post valve closed
11/24/2010	1:27:14 PM	Bubbler valve closed
11/24/2010	1:27:14 PM	Main Vac valve opened
11/24/2010	1:27:14 PM	Bypass valve opened
11/24/2010	1:27:14 PM	Helium MFC set to  0.000000
11/24/2010	1:27:14 PM	H2 MFC set to  0.000000
11/24/2010	1:27:14 PM	BCl3 MFC set to  0.000000
11/24/2010	1:27:14 PM	PHl3 MFC set to  0.000000
11/24/2010	1:27:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:27:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:27:14 PM	Tube furnace set to 0
11/24/2010	1:28:14 PM	H2 valve closed
11/24/2010	1:28:14 PM	BCl3 valve closed
11/24/2010	1:28:14 PM	PH3 valve closed
11/24/2010	1:28:14 PM	SiCl4 pre valve closed
11/24/2010	1:28:14 PM	SiCl4 post valve closed
11/24/2010	1:28:14 PM	Bubbler valve closed
11/24/2010	1:28:14 PM	Helium valve opened
11/24/2010	1:28:14 PM	Main Vac valve opened
11/24/2010	1:28:14 PM	Bypass valve opened
11/24/2010	1:28:14 PM	Helium MFC set to  100.000000
11/24/2010	1:28:14 PM	H2 MFC set to  0.000000
11/24/2010	1:28:14 PM	BCl3 MFC set to  0.000000
11/24/2010	1:28:14 PM	PHl3 MFC set to  0.000000
11/24/2010	1:28:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:28:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:28:14 PM	Tube furnace set to 0
11/24/2010	1:29:14 PM	Helium valve closed
11/24/2010	1:29:14 PM	H2 valve closed
11/24/2010	1:29:14 PM	BCl3 valve closed
11/24/2010	1:29:14 PM	PH3 valve closed
11/24/2010	1:29:14 PM	SiCl4 pre valve closed
11/24/2010	1:29:14 PM	SiCl4 post valve closed
11/24/2010	1:29:14 PM	Bubbler valve closed
11/24/2010	1:29:14 PM	Main Vac valve opened
11/24/2010	1:29:14 PM	Bypass valve opened
11/24/2010	1:29:14 PM	Helium MFC set to  0.000000
11/24/2010	1:29:14 PM	H2 MFC set to  0.000000
11/24/2010	1:29:14 PM	BCl3 MFC set to  0.000000
11/24/2010	1:29:14 PM	PHl3 MFC set to  0.000000
11/24/2010	1:29:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:29:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:29:14 PM	Tube furnace set to 0
11/24/2010	1:30:14 PM	H2 valve closed
11/24/2010	1:30:14 PM	BCl3 valve closed
11/24/2010	1:30:14 PM	PH3 valve closed
11/24/2010	1:30:14 PM	SiCl4 pre valve closed
11/24/2010	1:30:14 PM	SiCl4 post valve closed
11/24/2010	1:30:14 PM	Bubbler valve closed
11/24/2010	1:30:14 PM	Helium valve opened
11/24/2010	1:30:14 PM	Main Vac valve opened
11/24/2010	1:30:14 PM	Bypass valve opened
11/24/2010	1:30:14 PM	Helium MFC set to  100.000000
11/24/2010	1:30:14 PM	H2 MFC set to  0.000000
11/24/2010	1:30:14 PM	BCl3 MFC set to  0.000000
11/24/2010	1:30:14 PM	PHl3 MFC set to  0.000000
11/24/2010	1:30:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:30:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:30:15 PM	Tube furnace set to 0
11/24/2010	1:31:15 PM	Helium valve closed
11/24/2010	1:31:15 PM	H2 valve closed
11/24/2010	1:31:15 PM	BCl3 valve closed
11/24/2010	1:31:15 PM	PH3 valve closed
11/24/2010	1:31:15 PM	SiCl4 pre valve closed
11/24/2010	1:31:15 PM	SiCl4 post valve closed
11/24/2010	1:31:15 PM	Bubbler valve closed
11/24/2010	1:31:15 PM	Main Vac valve opened
11/24/2010	1:31:15 PM	Bypass valve opened
11/24/2010	1:31:15 PM	Helium MFC set to  0.000000
11/24/2010	1:31:15 PM	H2 MFC set to  0.000000
11/24/2010	1:31:15 PM	BCl3 MFC set to  0.000000
11/24/2010	1:31:15 PM	PHl3 MFC set to  0.000000
11/24/2010	1:31:15 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:31:15 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:31:15 PM	Tube furnace set to 0
11/24/2010	1:32:15 PM	H2 valve closed
11/24/2010	1:32:15 PM	BCl3 valve closed
11/24/2010	1:32:15 PM	PH3 valve closed
11/24/2010	1:32:15 PM	SiCl4 pre valve closed
11/24/2010	1:32:15 PM	SiCl4 post valve closed
11/24/2010	1:32:15 PM	Bubbler valve closed
11/24/2010	1:32:15 PM	Helium valve opened
11/24/2010	1:32:15 PM	Main Vac valve opened
11/24/2010	1:32:15 PM	Bypass valve opened
11/24/2010	1:32:15 PM	Helium MFC set to  100.000000
11/24/2010	1:32:15 PM	H2 MFC set to  0.000000
11/24/2010	1:32:15 PM	BCl3 MFC set to  0.000000
11/24/2010	1:32:15 PM	PHl3 MFC set to  0.000000
11/24/2010	1:32:15 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:32:15 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:32:15 PM	Tube furnace set to 0
11/24/2010	1:32:35 PM	Helium valve closed
11/24/2010	1:32:35 PM	H2 valve closed
11/24/2010	1:32:35 PM	BCl3 valve closed
11/24/2010	1:32:35 PM	PH3 valve closed
11/24/2010	1:32:36 PM	SiCl4 pre valve closed
11/24/2010	1:32:36 PM	SiCl4 post valve closed
11/24/2010	1:32:36 PM	Bubbler valve closed
11/24/2010	1:32:36 PM	Main Vac valve opened
11/24/2010	1:32:36 PM	Bypass valve opened
11/24/2010	1:32:36 PM	Helium MFC set to  0.000000
11/24/2010	1:32:36 PM	H2 MFC set to  0.000000
11/24/2010	1:32:36 PM	BCl3 MFC set to  0.000000
11/24/2010	1:32:36 PM	PHl3 MFC set to  0.000000
11/24/2010	1:32:36 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:32:36 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:32:36 PM	Tube furnace set to 0
11/24/2010	1:33:36 PM	H2 valve closed
11/24/2010	1:33:36 PM	BCl3 valve closed
11/24/2010	1:33:36 PM	PH3 valve closed
11/24/2010	1:33:36 PM	SiCl4 pre valve closed
11/24/2010	1:33:36 PM	SiCl4 post valve closed
11/24/2010	1:33:36 PM	Bubbler valve closed
11/24/2010	1:33:36 PM	Helium valve opened
11/24/2010	1:33:36 PM	Main Vac valve opened
11/24/2010	1:33:36 PM	Bypass valve opened
11/24/2010	1:33:36 PM	Helium MFC set to  100.000000
11/24/2010	1:33:36 PM	H2 MFC set to  0.000000
11/24/2010	1:33:36 PM	BCl3 MFC set to  0.000000
11/24/2010	1:33:36 PM	PHl3 MFC set to  0.000000
11/24/2010	1:33:36 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:33:36 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:33:36 PM	Tube furnace set to 0
11/24/2010	1:34:36 PM	Helium valve closed
11/24/2010	1:34:36 PM	H2 valve closed
11/24/2010	1:34:36 PM	BCl3 valve closed
11/24/2010	1:34:36 PM	PH3 valve closed
11/24/2010	1:34:36 PM	SiCl4 pre valve closed
11/24/2010	1:34:36 PM	SiCl4 post valve closed
11/24/2010	1:34:36 PM	Bubbler valve closed
11/24/2010	1:34:36 PM	Main Vac valve opened
11/24/2010	1:34:36 PM	Bypass valve opened
11/24/2010	1:34:36 PM	Helium MFC set to  0.000000
11/24/2010	1:34:36 PM	H2 MFC set to  0.000000
11/24/2010	1:34:36 PM	BCl3 MFC set to  0.000000
11/24/2010	1:34:36 PM	PHl3 MFC set to  0.000000
11/24/2010	1:34:36 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:34:36 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:34:36 PM	Tube furnace set to 0
11/24/2010	1:35:36 PM	H2 valve closed
11/24/2010	1:35:36 PM	BCl3 valve closed
11/24/2010	1:35:36 PM	PH3 valve closed
11/24/2010	1:35:36 PM	SiCl4 pre valve closed
11/24/2010	1:35:36 PM	SiCl4 post valve closed
11/24/2010	1:35:36 PM	Bubbler valve closed
11/24/2010	1:35:36 PM	Helium valve opened
11/24/2010	1:35:36 PM	Main Vac valve opened
11/24/2010	1:35:36 PM	Bypass valve opened
11/24/2010	1:35:36 PM	Helium MFC set to  100.000000
11/24/2010	1:35:36 PM	H2 MFC set to  0.000000
11/24/2010	1:35:36 PM	BCl3 MFC set to  0.000000
11/24/2010	1:35:36 PM	PHl3 MFC set to  0.000000
11/24/2010	1:35:36 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:35:36 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:35:36 PM	Tube furnace set to 0
11/24/2010	1:36:36 PM	Helium valve closed
11/24/2010	1:36:36 PM	H2 valve closed
11/24/2010	1:36:36 PM	BCl3 valve closed
11/24/2010	1:36:36 PM	PH3 valve closed
11/24/2010	1:36:36 PM	SiCl4 pre valve closed
11/24/2010	1:36:36 PM	SiCl4 post valve closed
11/24/2010	1:36:36 PM	Bubbler valve closed
11/24/2010	1:36:36 PM	Main Vac valve opened
11/24/2010	1:36:36 PM	Bypass valve opened
11/24/2010	1:36:36 PM	Helium MFC set to  0.000000
11/24/2010	1:36:36 PM	H2 MFC set to  0.000000
11/24/2010	1:36:36 PM	BCl3 MFC set to  0.000000
11/24/2010	1:36:36 PM	PHl3 MFC set to  0.000000
11/24/2010	1:36:36 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:36:36 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:36:36 PM	Tube furnace set to 0
11/24/2010	1:37:36 PM	H2 valve closed
11/24/2010	1:37:36 PM	BCl3 valve closed
11/24/2010	1:37:36 PM	PH3 valve closed
11/24/2010	1:37:36 PM	SiCl4 pre valve closed
11/24/2010	1:37:36 PM	SiCl4 post valve closed
11/24/2010	1:37:36 PM	Bubbler valve closed
11/24/2010	1:37:36 PM	Helium valve opened
11/24/2010	1:37:36 PM	Main Vac valve opened
11/24/2010	1:37:36 PM	Bypass valve opened
11/24/2010	1:37:36 PM	Helium MFC set to  100.000000
11/24/2010	1:37:36 PM	H2 MFC set to  0.000000
11/24/2010	1:37:36 PM	BCl3 MFC set to  0.000000
11/24/2010	1:37:36 PM	PHl3 MFC set to  0.000000
11/24/2010	1:37:36 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:37:36 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:37:37 PM	Tube furnace set to 0
11/24/2010	1:38:37 PM	Helium valve closed
11/24/2010	1:38:37 PM	H2 valve closed
11/24/2010	1:38:37 PM	BCl3 valve closed
11/24/2010	1:38:37 PM	PH3 valve closed
11/24/2010	1:38:37 PM	SiCl4 pre valve closed
11/24/2010	1:38:37 PM	SiCl4 post valve closed
11/24/2010	1:38:37 PM	Bubbler valve closed
11/24/2010	1:38:37 PM	Main Vac valve opened
11/24/2010	1:38:37 PM	Bypass valve opened
11/24/2010	1:38:37 PM	Helium MFC set to  0.000000
11/24/2010	1:38:37 PM	H2 MFC set to  0.000000
11/24/2010	1:38:37 PM	BCl3 MFC set to  0.000000
11/24/2010	1:38:37 PM	PHl3 MFC set to  0.000000
11/24/2010	1:38:37 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:38:37 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:38:37 PM	Tube furnace set to 0
11/24/2010	1:39:37 PM	H2 valve closed
11/24/2010	1:39:37 PM	BCl3 valve closed
11/24/2010	1:39:37 PM	PH3 valve closed
11/24/2010	1:39:37 PM	SiCl4 pre valve closed
11/24/2010	1:39:37 PM	SiCl4 post valve closed
11/24/2010	1:39:37 PM	Bubbler valve closed
11/24/2010	1:39:37 PM	Helium valve opened
11/24/2010	1:39:37 PM	Main Vac valve opened
11/24/2010	1:39:37 PM	Bypass valve opened
11/24/2010	1:39:37 PM	Helium MFC set to  100.000000
11/24/2010	1:39:37 PM	H2 MFC set to  0.000000
11/24/2010	1:39:37 PM	BCl3 MFC set to  0.000000
11/24/2010	1:39:37 PM	PHl3 MFC set to  0.000000
11/24/2010	1:39:37 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:39:37 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:39:37 PM	Tube furnace set to 0
11/24/2010	1:40:37 PM	Helium valve closed
11/24/2010	1:40:37 PM	H2 valve closed
11/24/2010	1:40:37 PM	BCl3 valve closed
11/24/2010	1:40:37 PM	PH3 valve closed
11/24/2010	1:40:37 PM	SiCl4 pre valve closed
11/24/2010	1:40:37 PM	SiCl4 post valve closed
11/24/2010	1:40:37 PM	Bubbler valve closed
11/24/2010	1:40:37 PM	Main Vac valve opened
11/24/2010	1:40:37 PM	Bypass valve opened
11/24/2010	1:40:37 PM	Helium MFC set to  0.000000
11/24/2010	1:40:37 PM	H2 MFC set to  0.000000
11/24/2010	1:40:37 PM	BCl3 MFC set to  0.000000
11/24/2010	1:40:37 PM	PHl3 MFC set to  0.000000
11/24/2010	1:40:37 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:40:37 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:40:37 PM	Tube furnace set to 0
11/24/2010	1:40:38 PM	Run finished at 1:40 PM
11/24/2010	1:40:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/24/2010	1:46:03 PM	Main Vac valve closed
11/24/2010	1:46:05 PM	Bypass valve closed
11/24/2010	1:46:12 PM	Bypass valve opened
11/24/2010	1:46:13 PM	Main Vac valve opened
11/24/2010	1:46:22 PM	Helium MFC set to  100.000000
11/24/2010	1:46:22 PM	Helium valve opened
11/24/2010	1:48:51 PM	Helium MFC set to  0.000000
11/24/2010	1:48:52 PM	Helium valve closed
11/24/2010	1:49:52 PM	Recipe started at 1:49 PM
11/24/2010	1:49:52 PM	Helium valve closed
11/24/2010	1:49:52 PM	BCl3 valve closed
11/24/2010	1:49:52 PM	PH3 valve closed
11/24/2010	1:49:52 PM	SiCl4 pre valve closed
11/24/2010	1:49:52 PM	SiCl4 post valve closed
11/24/2010	1:49:52 PM	Main Vac valve closed
11/24/2010	1:49:52 PM	Bypass valve closed
11/24/2010	1:49:52 PM	Bubbler valve closed
11/24/2010	1:49:52 PM	H2 valve opened
11/24/2010	1:49:52 PM	Helium MFC set to  0.000000
11/24/2010	1:49:52 PM	H2 MFC set to  500.000000
11/24/2010	1:49:52 PM	BCl3 MFC set to  0.000000
11/24/2010	1:49:52 PM	PHl3 MFC set to  0.000000
11/24/2010	1:49:52 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:49:52 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:49:53 PM	Tube furnace set to 0
11/24/2010	1:51:14 PM	Helium valve closed
11/24/2010	1:51:14 PM	BCl3 valve closed
11/24/2010	1:51:14 PM	PH3 valve closed
11/24/2010	1:51:14 PM	SiCl4 pre valve closed
11/24/2010	1:51:14 PM	SiCl4 post valve closed
11/24/2010	1:51:14 PM	Main Vac valve closed
11/24/2010	1:51:14 PM	Bypass valve closed
11/24/2010	1:51:14 PM	H2 valve opened
11/24/2010	1:51:14 PM	Bubbler valve opened
11/24/2010	1:51:14 PM	Helium MFC set to  0.000000
11/24/2010	1:51:14 PM	H2 MFC set to  500.000000
11/24/2010	1:51:14 PM	BCl3 MFC set to  0.000000
11/24/2010	1:51:14 PM	PHl3 MFC set to  0.000000
11/24/2010	1:51:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	1:51:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	1:51:14 PM	Tube furnace set to 1000
11/24/2010	2:11:14 PM	Helium valve closed
11/24/2010	2:11:14 PM	BCl3 valve closed
11/24/2010	2:11:14 PM	PH3 valve closed
11/24/2010	2:11:14 PM	Main Vac valve closed
11/24/2010	2:11:14 PM	Bypass valve closed
11/24/2010	2:11:14 PM	H2 valve opened
11/24/2010	2:11:14 PM	SiCl4 pre valve opened
11/24/2010	2:11:14 PM	SiCl4 post valve opened
11/24/2010	2:11:14 PM	Bubbler valve opened
11/24/2010	2:11:14 PM	Helium MFC set to  0.000000
11/24/2010	2:11:14 PM	H2 MFC set to  500.000000
11/24/2010	2:11:14 PM	BCl3 MFC set to  0.000000
11/24/2010	2:11:14 PM	PHl3 MFC set to  0.000000
11/24/2010	2:11:14 PM	SiCl4 MFC set to  50.000000
11/24/2010	2:11:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	2:11:14 PM	Tube furnace set to 1000
11/24/2010	2:12:14 PM	H2 valve closed
11/24/2010	2:12:14 PM	BCl3 valve closed
11/24/2010	2:12:14 PM	PH3 valve closed
11/24/2010	2:12:14 PM	SiCl4 pre valve closed
11/24/2010	2:12:14 PM	SiCl4 post valve closed
11/24/2010	2:12:14 PM	Main Vac valve closed
11/24/2010	2:12:14 PM	Bypass valve closed
11/24/2010	2:12:14 PM	Helium valve opened
11/24/2010	2:12:14 PM	Bubbler valve opened
11/24/2010	2:12:14 PM	Helium MFC set to  500.000000
11/24/2010	2:12:14 PM	H2 MFC set to  0.000000
11/24/2010	2:12:14 PM	BCl3 MFC set to  0.000000
11/24/2010	2:12:14 PM	PHl3 MFC set to  0.000000
11/24/2010	2:12:14 PM	SiCl4 MFC set to  0.000000
11/24/2010	2:12:14 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	2:12:15 PM	Tube furnace set to 0
11/24/2010	2:17:15 PM	Helium valve closed
11/24/2010	2:17:15 PM	H2 valve closed
11/24/2010	2:17:15 PM	BCl3 valve closed
11/24/2010	2:17:15 PM	PH3 valve closed
11/24/2010	2:17:15 PM	SiCl4 pre valve closed
11/24/2010	2:17:15 PM	SiCl4 post valve closed
11/24/2010	2:17:15 PM	Main Vac valve closed
11/24/2010	2:17:15 PM	Bypass valve closed
11/24/2010	2:17:15 PM	Bubbler valve closed
11/24/2010	2:17:15 PM	Helium MFC set to  0.000000
11/24/2010	2:17:15 PM	H2 MFC set to  0.000000
11/24/2010	2:17:15 PM	BCl3 MFC set to  0.000000
11/24/2010	2:17:15 PM	PHl3 MFC set to  0.000000
11/24/2010	2:17:15 PM	SiCl4 MFC set to  0.000000
11/24/2010	2:17:15 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	2:17:15 PM	Tube furnace set to 0
11/24/2010	2:17:15 PM	Run finished at 2:17 PM
11/24/2010	2:18:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2010	2:18:52 PM	Recipe started at 2:18 PM
11/24/2010	2:18:52 PM	Helium valve closed
11/24/2010	2:18:52 PM	H2 valve closed
11/24/2010	2:18:52 PM	BCl3 valve closed
11/24/2010	2:18:52 PM	PH3 valve closed
11/24/2010	2:18:52 PM	SiCl4 pre valve closed
11/24/2010	2:18:52 PM	SiCl4 post valve closed
11/24/2010	2:18:52 PM	Main Vac valve closed
11/24/2010	2:18:52 PM	Bubbler valve closed
11/24/2010	2:18:52 PM	Bypass valve opened
11/24/2010	2:18:52 PM	Helium MFC set to  0.000000
11/24/2010	2:18:52 PM	H2 MFC set to  0.000000
11/24/2010	2:18:52 PM	BCl3 MFC set to  0.000000
11/24/2010	2:18:52 PM	PHl3 MFC set to  0.000000
11/24/2010	2:18:52 PM	SiCl4 MFC set to  0.000000
11/24/2010	2:18:52 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	2:18:52 PM	Tube furnace set to 0
11/24/2010	2:19:38 PM	Helium valve closed
11/24/2010	2:19:38 PM	H2 valve closed
11/24/2010	2:19:39 PM	BCl3 valve closed
11/24/2010	2:19:39 PM	PH3 valve closed
11/24/2010	2:19:39 PM	SiCl4 pre valve closed
11/24/2010	2:19:39 PM	SiCl4 post valve closed
11/24/2010	2:19:39 PM	Bubbler valve closed
11/24/2010	2:19:39 PM	Main Vac valve opened
11/24/2010	2:19:39 PM	Bypass valve opened
11/24/2010	2:19:39 PM	Helium MFC set to  0.000000
11/24/2010	2:19:39 PM	H2 MFC set to  0.000000
11/24/2010	2:19:39 PM	BCl3 MFC set to  0.000000
11/24/2010	2:19:39 PM	PHl3 MFC set to  0.000000
11/24/2010	2:19:39 PM	SiCl4 MFC set to  0.000000
11/24/2010	2:19:39 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	2:19:39 PM	Tube furnace set to 0
11/24/2010	2:19:39 PM	Run finished at 2:19 PM
11/24/2010	2:19:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2010	3:21:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/24/2010	3:21:56 PM	Recipe started at 3:21 PM
11/24/2010	3:21:56 PM	H2 valve closed
11/24/2010	3:21:56 PM	BCl3 valve closed
11/24/2010	3:21:56 PM	PH3 valve closed
11/24/2010	3:21:56 PM	SiCl4 pre valve closed
11/24/2010	3:21:56 PM	SiCl4 post valve closed
11/24/2010	3:21:56 PM	Main Vac valve closed
11/24/2010	3:21:56 PM	Bypass valve closed
11/24/2010	3:21:56 PM	Bubbler valve closed
11/24/2010	3:21:56 PM	Helium valve opened
11/24/2010	3:21:56 PM	Helium MFC set to  500.000000
11/24/2010	3:21:56 PM	H2 MFC set to  0.000000
11/24/2010	3:21:56 PM	BCl3 MFC set to  0.000000
11/24/2010	3:21:56 PM	PHl3 MFC set to  0.000000
11/24/2010	3:21:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:21:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:21:56 PM	Tube furnace set to 0
11/24/2010	3:23:15 PM	Helium valve closed
11/24/2010	3:23:15 PM	H2 valve closed
11/24/2010	3:23:15 PM	BCl3 valve closed
11/24/2010	3:23:15 PM	PH3 valve closed
11/24/2010	3:23:15 PM	SiCl4 pre valve closed
11/24/2010	3:23:15 PM	SiCl4 post valve closed
11/24/2010	3:23:15 PM	Main Vac valve closed
11/24/2010	3:23:15 PM	Bypass valve closed
11/24/2010	3:23:15 PM	Bubbler valve closed
11/24/2010	3:23:15 PM	Helium MFC set to  0.000000
11/24/2010	3:23:15 PM	H2 MFC set to  0.000000
11/24/2010	3:23:15 PM	BCl3 MFC set to  0.000000
11/24/2010	3:23:15 PM	PHl3 MFC set to  0.000000
11/24/2010	3:23:15 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:23:15 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:23:16 PM	Tube furnace set to 0
11/24/2010	3:23:16 PM	Run finished at 3:23 PM
11/24/2010	3:23:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/24/2010	3:25:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/24/2010	3:26:03 PM	Recipe started at 3:25 PM
11/24/2010	3:26:03 PM	Helium valve closed
11/24/2010	3:26:03 PM	H2 valve closed
11/24/2010	3:26:03 PM	BCl3 valve closed
11/24/2010	3:26:03 PM	PH3 valve closed
11/24/2010	3:26:03 PM	SiCl4 pre valve closed
11/24/2010	3:26:03 PM	SiCl4 post valve closed
11/24/2010	3:26:03 PM	Main Vac valve closed
11/24/2010	3:26:03 PM	Bubbler valve closed
11/24/2010	3:26:03 PM	Bypass valve opened
11/24/2010	3:26:03 PM	Helium MFC set to  0.000000
11/24/2010	3:26:03 PM	H2 MFC set to  0.000000
11/24/2010	3:26:03 PM	BCl3 MFC set to  0.000000
11/24/2010	3:26:03 PM	PHl3 MFC set to  0.000000
11/24/2010	3:26:03 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:26:03 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:26:03 PM	Tube furnace set to 0
11/24/2010	3:26:54 PM	Helium valve closed
11/24/2010	3:26:54 PM	H2 valve closed
11/24/2010	3:26:54 PM	BCl3 valve closed
11/24/2010	3:26:54 PM	PH3 valve closed
11/24/2010	3:26:54 PM	SiCl4 pre valve closed
11/24/2010	3:26:54 PM	SiCl4 post valve closed
11/24/2010	3:26:54 PM	Bubbler valve closed
11/24/2010	3:26:54 PM	Main Vac valve opened
11/24/2010	3:26:54 PM	Bypass valve opened
11/24/2010	3:26:54 PM	Helium MFC set to  0.000000
11/24/2010	3:26:54 PM	H2 MFC set to  0.000000
11/24/2010	3:26:54 PM	BCl3 MFC set to  0.000000
11/24/2010	3:26:54 PM	PHl3 MFC set to  0.000000
11/24/2010	3:26:54 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:26:54 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:26:55 PM	Tube furnace set to 0
11/24/2010	3:27:55 PM	H2 valve closed
11/24/2010	3:27:55 PM	BCl3 valve closed
11/24/2010	3:27:55 PM	PH3 valve closed
11/24/2010	3:27:55 PM	SiCl4 pre valve closed
11/24/2010	3:27:55 PM	SiCl4 post valve closed
11/24/2010	3:27:55 PM	Bubbler valve closed
11/24/2010	3:27:55 PM	Helium valve opened
11/24/2010	3:27:55 PM	Main Vac valve opened
11/24/2010	3:27:55 PM	Bypass valve opened
11/24/2010	3:27:55 PM	Helium MFC set to  100.000000
11/24/2010	3:27:55 PM	H2 MFC set to  0.000000
11/24/2010	3:27:55 PM	BCl3 MFC set to  0.000000
11/24/2010	3:27:55 PM	PHl3 MFC set to  0.000000
11/24/2010	3:27:55 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:27:55 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:27:55 PM	Tube furnace set to 0
11/24/2010	3:28:55 PM	Helium valve closed
11/24/2010	3:28:55 PM	H2 valve closed
11/24/2010	3:28:55 PM	BCl3 valve closed
11/24/2010	3:28:55 PM	PH3 valve closed
11/24/2010	3:28:55 PM	SiCl4 pre valve closed
11/24/2010	3:28:55 PM	SiCl4 post valve closed
11/24/2010	3:28:55 PM	Bubbler valve closed
11/24/2010	3:28:55 PM	Main Vac valve opened
11/24/2010	3:28:55 PM	Bypass valve opened
11/24/2010	3:28:55 PM	Helium MFC set to  0.000000
11/24/2010	3:28:55 PM	H2 MFC set to  0.000000
11/24/2010	3:28:55 PM	BCl3 MFC set to  0.000000
11/24/2010	3:28:55 PM	PHl3 MFC set to  0.000000
11/24/2010	3:28:55 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:28:55 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:28:55 PM	Tube furnace set to 0
11/24/2010	3:29:55 PM	H2 valve closed
11/24/2010	3:29:55 PM	BCl3 valve closed
11/24/2010	3:29:55 PM	PH3 valve closed
11/24/2010	3:29:55 PM	SiCl4 pre valve closed
11/24/2010	3:29:55 PM	SiCl4 post valve closed
11/24/2010	3:29:55 PM	Bubbler valve closed
11/24/2010	3:29:55 PM	Helium valve opened
11/24/2010	3:29:55 PM	Main Vac valve opened
11/24/2010	3:29:55 PM	Bypass valve opened
11/24/2010	3:29:55 PM	Helium MFC set to  100.000000
11/24/2010	3:29:55 PM	H2 MFC set to  0.000000
11/24/2010	3:29:55 PM	BCl3 MFC set to  0.000000
11/24/2010	3:29:55 PM	PHl3 MFC set to  0.000000
11/24/2010	3:29:55 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:29:55 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:29:55 PM	Tube furnace set to 0
11/24/2010	3:30:55 PM	Helium valve closed
11/24/2010	3:30:55 PM	H2 valve closed
11/24/2010	3:30:55 PM	BCl3 valve closed
11/24/2010	3:30:55 PM	PH3 valve closed
11/24/2010	3:30:55 PM	SiCl4 pre valve closed
11/24/2010	3:30:55 PM	SiCl4 post valve closed
11/24/2010	3:30:55 PM	Bubbler valve closed
11/24/2010	3:30:55 PM	Main Vac valve opened
11/24/2010	3:30:55 PM	Bypass valve opened
11/24/2010	3:30:55 PM	Helium MFC set to  0.000000
11/24/2010	3:30:55 PM	H2 MFC set to  0.000000
11/24/2010	3:30:55 PM	BCl3 MFC set to  0.000000
11/24/2010	3:30:55 PM	PHl3 MFC set to  0.000000
11/24/2010	3:30:55 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:30:55 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:30:55 PM	Tube furnace set to 0
11/24/2010	3:31:55 PM	H2 valve closed
11/24/2010	3:31:55 PM	BCl3 valve closed
11/24/2010	3:31:55 PM	PH3 valve closed
11/24/2010	3:31:55 PM	SiCl4 pre valve closed
11/24/2010	3:31:55 PM	SiCl4 post valve closed
11/24/2010	3:31:55 PM	Bubbler valve closed
11/24/2010	3:31:55 PM	Helium valve opened
11/24/2010	3:31:55 PM	Main Vac valve opened
11/24/2010	3:31:55 PM	Bypass valve opened
11/24/2010	3:31:55 PM	Helium MFC set to  100.000000
11/24/2010	3:31:55 PM	H2 MFC set to  0.000000
11/24/2010	3:31:55 PM	BCl3 MFC set to  0.000000
11/24/2010	3:31:55 PM	PHl3 MFC set to  0.000000
11/24/2010	3:31:55 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:31:55 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:31:55 PM	Tube furnace set to 0
11/24/2010	3:32:56 PM	Helium valve closed
11/24/2010	3:32:56 PM	H2 valve closed
11/24/2010	3:32:56 PM	BCl3 valve closed
11/24/2010	3:32:56 PM	PH3 valve closed
11/24/2010	3:32:56 PM	SiCl4 pre valve closed
11/24/2010	3:32:56 PM	SiCl4 post valve closed
11/24/2010	3:32:56 PM	Bubbler valve closed
11/24/2010	3:32:56 PM	Main Vac valve opened
11/24/2010	3:32:56 PM	Bypass valve opened
11/24/2010	3:32:56 PM	Helium MFC set to  0.000000
11/24/2010	3:32:56 PM	H2 MFC set to  0.000000
11/24/2010	3:32:56 PM	BCl3 MFC set to  0.000000
11/24/2010	3:32:56 PM	PHl3 MFC set to  0.000000
11/24/2010	3:32:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:32:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:32:56 PM	Tube furnace set to 0
11/24/2010	3:33:56 PM	H2 valve closed
11/24/2010	3:33:56 PM	BCl3 valve closed
11/24/2010	3:33:56 PM	PH3 valve closed
11/24/2010	3:33:56 PM	SiCl4 pre valve closed
11/24/2010	3:33:56 PM	SiCl4 post valve closed
11/24/2010	3:33:56 PM	Bubbler valve closed
11/24/2010	3:33:56 PM	Helium valve opened
11/24/2010	3:33:56 PM	Main Vac valve opened
11/24/2010	3:33:56 PM	Bypass valve opened
11/24/2010	3:33:56 PM	Helium MFC set to  100.000000
11/24/2010	3:33:56 PM	H2 MFC set to  0.000000
11/24/2010	3:33:56 PM	BCl3 MFC set to  0.000000
11/24/2010	3:33:56 PM	PHl3 MFC set to  0.000000
11/24/2010	3:33:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:33:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:33:56 PM	Tube furnace set to 0
11/24/2010	3:34:56 PM	Helium valve closed
11/24/2010	3:34:56 PM	H2 valve closed
11/24/2010	3:34:56 PM	BCl3 valve closed
11/24/2010	3:34:56 PM	PH3 valve closed
11/24/2010	3:34:56 PM	SiCl4 pre valve closed
11/24/2010	3:34:56 PM	SiCl4 post valve closed
11/24/2010	3:34:56 PM	Bubbler valve closed
11/24/2010	3:34:56 PM	Main Vac valve opened
11/24/2010	3:34:56 PM	Bypass valve opened
11/24/2010	3:34:56 PM	Helium MFC set to  0.000000
11/24/2010	3:34:56 PM	H2 MFC set to  0.000000
11/24/2010	3:34:56 PM	BCl3 MFC set to  0.000000
11/24/2010	3:34:56 PM	PHl3 MFC set to  0.000000
11/24/2010	3:34:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:34:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:34:56 PM	Tube furnace set to 0
11/24/2010	3:35:56 PM	H2 valve closed
11/24/2010	3:35:56 PM	BCl3 valve closed
11/24/2010	3:35:56 PM	PH3 valve closed
11/24/2010	3:35:56 PM	SiCl4 pre valve closed
11/24/2010	3:35:56 PM	SiCl4 post valve closed
11/24/2010	3:35:56 PM	Bubbler valve closed
11/24/2010	3:35:56 PM	Helium valve opened
11/24/2010	3:35:56 PM	Main Vac valve opened
11/24/2010	3:35:56 PM	Bypass valve opened
11/24/2010	3:35:56 PM	Helium MFC set to  100.000000
11/24/2010	3:35:56 PM	H2 MFC set to  0.000000
11/24/2010	3:35:56 PM	BCl3 MFC set to  0.000000
11/24/2010	3:35:56 PM	PHl3 MFC set to  0.000000
11/24/2010	3:35:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:35:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:35:56 PM	Tube furnace set to 0
11/24/2010	3:36:56 PM	Helium valve closed
11/24/2010	3:36:56 PM	H2 valve closed
11/24/2010	3:36:56 PM	BCl3 valve closed
11/24/2010	3:36:56 PM	PH3 valve closed
11/24/2010	3:36:56 PM	SiCl4 pre valve closed
11/24/2010	3:36:56 PM	SiCl4 post valve closed
11/24/2010	3:36:56 PM	Bubbler valve closed
11/24/2010	3:36:56 PM	Main Vac valve opened
11/24/2010	3:36:56 PM	Bypass valve opened
11/24/2010	3:36:56 PM	Helium MFC set to  0.000000
11/24/2010	3:36:56 PM	H2 MFC set to  0.000000
11/24/2010	3:36:56 PM	BCl3 MFC set to  0.000000
11/24/2010	3:36:56 PM	PHl3 MFC set to  0.000000
11/24/2010	3:36:56 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:36:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:36:57 PM	Tube furnace set to 0
11/24/2010	3:37:57 PM	H2 valve closed
11/24/2010	3:37:57 PM	BCl3 valve closed
11/24/2010	3:37:57 PM	PH3 valve closed
11/24/2010	3:37:57 PM	SiCl4 pre valve closed
11/24/2010	3:37:57 PM	SiCl4 post valve closed
11/24/2010	3:37:57 PM	Bubbler valve closed
11/24/2010	3:37:57 PM	Helium valve opened
11/24/2010	3:37:57 PM	Main Vac valve opened
11/24/2010	3:37:57 PM	Bypass valve opened
11/24/2010	3:37:57 PM	Helium MFC set to  100.000000
11/24/2010	3:37:57 PM	H2 MFC set to  0.000000
11/24/2010	3:37:57 PM	BCl3 MFC set to  0.000000
11/24/2010	3:37:57 PM	PHl3 MFC set to  0.000000
11/24/2010	3:37:57 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:37:57 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:37:57 PM	Tube furnace set to 0
11/24/2010	3:38:57 PM	Helium valve closed
11/24/2010	3:38:57 PM	H2 valve closed
11/24/2010	3:38:57 PM	BCl3 valve closed
11/24/2010	3:38:57 PM	PH3 valve closed
11/24/2010	3:38:57 PM	SiCl4 pre valve closed
11/24/2010	3:38:57 PM	SiCl4 post valve closed
11/24/2010	3:38:57 PM	Bubbler valve closed
11/24/2010	3:38:57 PM	Main Vac valve opened
11/24/2010	3:38:57 PM	Bypass valve opened
11/24/2010	3:38:57 PM	Helium MFC set to  0.000000
11/24/2010	3:38:57 PM	H2 MFC set to  0.000000
11/24/2010	3:38:57 PM	BCl3 MFC set to  0.000000
11/24/2010	3:38:57 PM	PHl3 MFC set to  0.000000
11/24/2010	3:38:57 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:38:57 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:38:57 PM	Tube furnace set to 0
11/24/2010	3:39:57 PM	H2 valve closed
11/24/2010	3:39:57 PM	BCl3 valve closed
11/24/2010	3:39:57 PM	PH3 valve closed
11/24/2010	3:39:57 PM	SiCl4 pre valve closed
11/24/2010	3:39:57 PM	SiCl4 post valve closed
11/24/2010	3:39:57 PM	Bubbler valve closed
11/24/2010	3:39:57 PM	Helium valve opened
11/24/2010	3:39:57 PM	Main Vac valve opened
11/24/2010	3:39:57 PM	Bypass valve opened
11/24/2010	3:39:57 PM	Helium MFC set to  100.000000
11/24/2010	3:39:57 PM	H2 MFC set to  0.000000
11/24/2010	3:39:57 PM	BCl3 MFC set to  0.000000
11/24/2010	3:39:57 PM	PHl3 MFC set to  0.000000
11/24/2010	3:39:57 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:39:57 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:39:57 PM	Tube furnace set to 0
11/24/2010	3:40:57 PM	Helium valve closed
11/24/2010	3:40:57 PM	H2 valve closed
11/24/2010	3:40:57 PM	BCl3 valve closed
11/24/2010	3:40:57 PM	PH3 valve closed
11/24/2010	3:40:57 PM	SiCl4 pre valve closed
11/24/2010	3:40:57 PM	SiCl4 post valve closed
11/24/2010	3:40:57 PM	Bubbler valve closed
11/24/2010	3:40:57 PM	Main Vac valve opened
11/24/2010	3:40:57 PM	Bypass valve opened
11/24/2010	3:40:57 PM	Helium MFC set to  0.000000
11/24/2010	3:40:57 PM	H2 MFC set to  0.000000
11/24/2010	3:40:57 PM	BCl3 MFC set to  0.000000
11/24/2010	3:40:57 PM	PHl3 MFC set to  0.000000
11/24/2010	3:40:57 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:40:57 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:40:57 PM	Tube furnace set to 0
11/24/2010	3:41:57 PM	H2 valve closed
11/24/2010	3:41:57 PM	BCl3 valve closed
11/24/2010	3:41:57 PM	PH3 valve closed
11/24/2010	3:41:57 PM	SiCl4 pre valve closed
11/24/2010	3:41:57 PM	SiCl4 post valve closed
11/24/2010	3:41:57 PM	Bubbler valve closed
11/24/2010	3:41:57 PM	Helium valve opened
11/24/2010	3:41:57 PM	Main Vac valve opened
11/24/2010	3:41:57 PM	Bypass valve opened
11/24/2010	3:41:57 PM	Helium MFC set to  100.000000
11/24/2010	3:41:57 PM	H2 MFC set to  0.000000
11/24/2010	3:41:57 PM	BCl3 MFC set to  0.000000
11/24/2010	3:41:57 PM	PHl3 MFC set to  0.000000
11/24/2010	3:41:57 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:41:57 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:41:57 PM	Tube furnace set to 0
11/24/2010	3:42:58 PM	Helium valve closed
11/24/2010	3:42:58 PM	H2 valve closed
11/24/2010	3:42:58 PM	BCl3 valve closed
11/24/2010	3:42:58 PM	PH3 valve closed
11/24/2010	3:42:58 PM	SiCl4 pre valve closed
11/24/2010	3:42:58 PM	SiCl4 post valve closed
11/24/2010	3:42:58 PM	Bubbler valve closed
11/24/2010	3:42:58 PM	Main Vac valve opened
11/24/2010	3:42:58 PM	Bypass valve opened
11/24/2010	3:42:58 PM	Helium MFC set to  0.000000
11/24/2010	3:42:58 PM	H2 MFC set to  0.000000
11/24/2010	3:42:58 PM	BCl3 MFC set to  0.000000
11/24/2010	3:42:58 PM	PHl3 MFC set to  0.000000
11/24/2010	3:42:58 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:42:58 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:42:58 PM	Tube furnace set to 0
11/24/2010	3:43:58 PM	H2 valve closed
11/24/2010	3:43:58 PM	BCl3 valve closed
11/24/2010	3:43:58 PM	PH3 valve closed
11/24/2010	3:43:58 PM	SiCl4 pre valve closed
11/24/2010	3:43:58 PM	SiCl4 post valve closed
11/24/2010	3:43:58 PM	Bubbler valve closed
11/24/2010	3:43:58 PM	Helium valve opened
11/24/2010	3:43:58 PM	Main Vac valve opened
11/24/2010	3:43:58 PM	Bypass valve opened
11/24/2010	3:43:58 PM	Helium MFC set to  100.000000
11/24/2010	3:43:58 PM	H2 MFC set to  0.000000
11/24/2010	3:43:58 PM	BCl3 MFC set to  0.000000
11/24/2010	3:43:58 PM	PHl3 MFC set to  0.000000
11/24/2010	3:43:58 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:43:58 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:43:58 PM	Tube furnace set to 0
11/24/2010	3:44:58 PM	Helium valve closed
11/24/2010	3:44:58 PM	H2 valve closed
11/24/2010	3:44:58 PM	BCl3 valve closed
11/24/2010	3:44:58 PM	PH3 valve closed
11/24/2010	3:44:58 PM	SiCl4 pre valve closed
11/24/2010	3:44:58 PM	SiCl4 post valve closed
11/24/2010	3:44:58 PM	Bubbler valve closed
11/24/2010	3:44:58 PM	Main Vac valve opened
11/24/2010	3:44:58 PM	Bypass valve opened
11/24/2010	3:44:58 PM	Helium MFC set to  0.000000
11/24/2010	3:44:58 PM	H2 MFC set to  0.000000
11/24/2010	3:44:58 PM	BCl3 MFC set to  0.000000
11/24/2010	3:44:58 PM	PHl3 MFC set to  0.000000
11/24/2010	3:44:58 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:44:58 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:44:58 PM	Tube furnace set to 0
11/24/2010	3:45:58 PM	H2 valve closed
11/24/2010	3:45:58 PM	BCl3 valve closed
11/24/2010	3:45:58 PM	PH3 valve closed
11/24/2010	3:45:58 PM	SiCl4 pre valve closed
11/24/2010	3:45:58 PM	SiCl4 post valve closed
11/24/2010	3:45:58 PM	Bubbler valve closed
11/24/2010	3:45:58 PM	Helium valve opened
11/24/2010	3:45:58 PM	Main Vac valve opened
11/24/2010	3:45:58 PM	Bypass valve opened
11/24/2010	3:45:58 PM	Helium MFC set to  100.000000
11/24/2010	3:45:58 PM	H2 MFC set to  0.000000
11/24/2010	3:45:58 PM	BCl3 MFC set to  0.000000
11/24/2010	3:45:58 PM	PHl3 MFC set to  0.000000
11/24/2010	3:45:58 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:45:58 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:45:58 PM	Tube furnace set to 0
11/24/2010	3:46:58 PM	Helium valve closed
11/24/2010	3:46:58 PM	H2 valve closed
11/24/2010	3:46:58 PM	BCl3 valve closed
11/24/2010	3:46:58 PM	PH3 valve closed
11/24/2010	3:46:58 PM	SiCl4 pre valve closed
11/24/2010	3:46:58 PM	SiCl4 post valve closed
11/24/2010	3:46:58 PM	Bubbler valve closed
11/24/2010	3:46:58 PM	Main Vac valve opened
11/24/2010	3:46:58 PM	Bypass valve opened
11/24/2010	3:46:58 PM	Helium MFC set to  0.000000
11/24/2010	3:46:58 PM	H2 MFC set to  0.000000
11/24/2010	3:46:58 PM	BCl3 MFC set to  0.000000
11/24/2010	3:46:58 PM	PHl3 MFC set to  0.000000
11/24/2010	3:46:58 PM	SiCl4 MFC set to  0.000000
11/24/2010	3:46:58 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	3:46:58 PM	Tube furnace set to 0
11/24/2010	3:46:59 PM	Run finished at 3:46 PM
11/24/2010	3:46:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/24/2010	5:01:14 PM	Main Vac valve closed
11/24/2010	5:01:16 PM	Bypass valve closed
11/24/2010	5:01:19 PM	Bypass valve opened
11/24/2010	5:01:20 PM	Main Vac valve opened
11/24/2010	5:01:59 PM	Recipe started at 5:01 PM
11/24/2010	5:01:59 PM	Helium valve closed
11/24/2010	5:01:59 PM	BCl3 valve closed
11/24/2010	5:01:59 PM	PH3 valve closed
11/24/2010	5:01:59 PM	SiCl4 pre valve closed
11/24/2010	5:01:59 PM	SiCl4 post valve closed
11/24/2010	5:01:59 PM	Main Vac valve closed
11/24/2010	5:01:59 PM	Bypass valve closed
11/24/2010	5:01:59 PM	Bubbler valve closed
11/24/2010	5:01:59 PM	H2 valve opened
11/24/2010	5:01:59 PM	Helium MFC set to  0.000000
11/24/2010	5:01:59 PM	H2 MFC set to  500.000000
11/24/2010	5:01:59 PM	BCl3 MFC set to  0.000000
11/24/2010	5:01:59 PM	PHl3 MFC set to  0.000000
11/24/2010	5:01:59 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:01:59 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:01:59 PM	Tube furnace set to 0
11/24/2010	5:02:12 PM	Run aborted at 5:02 PM
11/24/2010	5:02:12 PM	Helium valve closed
11/24/2010	5:02:12 PM	H2 valve closed
11/24/2010	5:02:12 PM	BCl3 valve closed
11/24/2010	5:02:12 PM	PH3 valve closed
11/24/2010	5:02:12 PM	SiCl4 pre valve closed
11/24/2010	5:02:12 PM	SiCl4 post valve closed
11/24/2010	5:02:12 PM	Bypass valve closed
11/24/2010	5:02:12 PM	Main Vac valve closed
11/24/2010	5:02:12 PM	Bubbler valve closed
11/24/2010	5:02:12 PM	Helium MFC set to  0.000000
11/24/2010	5:02:12 PM	H2 MFC set to  0.000000
11/24/2010	5:02:12 PM	BCl3 MFC set to  0.000000
11/24/2010	5:02:12 PM	PHl3 MFC set to  0.000000
11/24/2010	5:02:12 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:02:12 PM	Tube furnace set to 0
11/24/2010	5:02:35 PM	Recipe started at 5:02 PM
11/24/2010	5:02:35 PM	Helium valve closed
11/24/2010	5:02:35 PM	BCl3 valve closed
11/24/2010	5:02:35 PM	PH3 valve closed
11/24/2010	5:02:35 PM	SiCl4 pre valve closed
11/24/2010	5:02:35 PM	SiCl4 post valve closed
11/24/2010	5:02:35 PM	Main Vac valve closed
11/24/2010	5:02:35 PM	Bypass valve closed
11/24/2010	5:02:35 PM	Bubbler valve closed
11/24/2010	5:02:35 PM	H2 valve opened
11/24/2010	5:02:35 PM	Helium MFC set to  0.000000
11/24/2010	5:02:35 PM	H2 MFC set to  500.000000
11/24/2010	5:02:35 PM	BCl3 MFC set to  0.000000
11/24/2010	5:02:35 PM	PHl3 MFC set to  0.000000
11/24/2010	5:02:35 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:02:35 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:02:35 PM	Tube furnace set to 0
11/24/2010	5:03:44 PM	Helium valve closed
11/24/2010	5:03:44 PM	BCl3 valve closed
11/24/2010	5:03:44 PM	PH3 valve closed
11/24/2010	5:03:44 PM	SiCl4 pre valve closed
11/24/2010	5:03:44 PM	SiCl4 post valve closed
11/24/2010	5:03:44 PM	Main Vac valve closed
11/24/2010	5:03:44 PM	Bypass valve closed
11/24/2010	5:03:44 PM	H2 valve opened
11/24/2010	5:03:44 PM	Bubbler valve opened
11/24/2010	5:03:44 PM	Helium MFC set to  0.000000
11/24/2010	5:03:44 PM	H2 MFC set to  500.000000
11/24/2010	5:03:44 PM	BCl3 MFC set to  0.000000
11/24/2010	5:03:44 PM	PHl3 MFC set to  0.000000
11/24/2010	5:03:44 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:03:44 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:03:44 PM	Tube furnace set to 950
11/24/2010	5:24:44 PM	Helium valve closed
11/24/2010	5:24:44 PM	BCl3 valve closed
11/24/2010	5:24:44 PM	PH3 valve closed
11/24/2010	5:24:44 PM	Main Vac valve closed
11/24/2010	5:24:44 PM	Bypass valve closed
11/24/2010	5:24:44 PM	H2 valve opened
11/24/2010	5:24:44 PM	SiCl4 pre valve opened
11/24/2010	5:24:44 PM	SiCl4 post valve opened
11/24/2010	5:24:44 PM	Bubbler valve opened
11/24/2010	5:24:44 PM	Helium MFC set to  0.000000
11/24/2010	5:24:44 PM	H2 MFC set to  500.000000
11/24/2010	5:24:44 PM	BCl3 MFC set to  0.000000
11/24/2010	5:24:44 PM	PHl3 MFC set to  0.000000
11/24/2010	5:24:44 PM	SiCl4 MFC set to  50.000000
11/24/2010	5:24:44 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:24:44 PM	Tube furnace set to 950
11/24/2010	5:25:44 PM	H2 valve closed
11/24/2010	5:25:44 PM	BCl3 valve closed
11/24/2010	5:25:44 PM	PH3 valve closed
11/24/2010	5:25:44 PM	SiCl4 pre valve closed
11/24/2010	5:25:44 PM	SiCl4 post valve closed
11/24/2010	5:25:44 PM	Main Vac valve closed
11/24/2010	5:25:44 PM	Bypass valve closed
11/24/2010	5:25:44 PM	Helium valve opened
11/24/2010	5:25:44 PM	Bubbler valve opened
11/24/2010	5:25:44 PM	Helium MFC set to  500.000000
11/24/2010	5:25:44 PM	H2 MFC set to  0.000000
11/24/2010	5:25:44 PM	BCl3 MFC set to  0.000000
11/24/2010	5:25:44 PM	PHl3 MFC set to  0.000000
11/24/2010	5:25:44 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:25:44 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:25:44 PM	Tube furnace set to 0
11/24/2010	5:39:04 PM	Helium valve closed
11/24/2010	5:39:04 PM	H2 valve closed
11/24/2010	5:39:04 PM	BCl3 valve closed
11/24/2010	5:39:04 PM	PH3 valve closed
11/24/2010	5:39:04 PM	SiCl4 pre valve closed
11/24/2010	5:39:04 PM	SiCl4 post valve closed
11/24/2010	5:39:04 PM	Main Vac valve closed
11/24/2010	5:39:04 PM	Bypass valve closed
11/24/2010	5:39:04 PM	Bubbler valve closed
11/24/2010	5:39:04 PM	Helium MFC set to  0.000000
11/24/2010	5:39:04 PM	H2 MFC set to  0.000000
11/24/2010	5:39:04 PM	BCl3 MFC set to  0.000000
11/24/2010	5:39:04 PM	PHl3 MFC set to  0.000000
11/24/2010	5:39:04 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:39:04 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:39:04 PM	Tube furnace set to 0
11/24/2010	5:39:04 PM	Run finished at 5:39 PM
11/24/2010	5:40:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2010	5:40:15 PM	Recipe started at 5:40 PM
11/24/2010	5:40:15 PM	Helium valve closed
11/24/2010	5:40:15 PM	H2 valve closed
11/24/2010	5:40:15 PM	BCl3 valve closed
11/24/2010	5:40:15 PM	PH3 valve closed
11/24/2010	5:40:15 PM	SiCl4 pre valve closed
11/24/2010	5:40:15 PM	SiCl4 post valve closed
11/24/2010	5:40:15 PM	Main Vac valve closed
11/24/2010	5:40:15 PM	Bubbler valve closed
11/24/2010	5:40:15 PM	Bypass valve opened
11/24/2010	5:40:15 PM	Helium MFC set to  0.000000
11/24/2010	5:40:15 PM	H2 MFC set to  0.000000
11/24/2010	5:40:15 PM	BCl3 MFC set to  0.000000
11/24/2010	5:40:15 PM	PHl3 MFC set to  0.000000
11/24/2010	5:40:15 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:40:15 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:40:16 PM	Tube furnace set to 0
11/24/2010	5:41:05 PM	Helium valve closed
11/24/2010	5:41:05 PM	H2 valve closed
11/24/2010	5:41:05 PM	BCl3 valve closed
11/24/2010	5:41:05 PM	PH3 valve closed
11/24/2010	5:41:05 PM	SiCl4 pre valve closed
11/24/2010	5:41:05 PM	SiCl4 post valve closed
11/24/2010	5:41:05 PM	Bubbler valve closed
11/24/2010	5:41:05 PM	Main Vac valve opened
11/24/2010	5:41:05 PM	Bypass valve opened
11/24/2010	5:41:05 PM	Helium MFC set to  0.000000
11/24/2010	5:41:05 PM	H2 MFC set to  0.000000
11/24/2010	5:41:05 PM	BCl3 MFC set to  0.000000
11/24/2010	5:41:05 PM	PHl3 MFC set to  0.000000
11/24/2010	5:41:05 PM	SiCl4 MFC set to  0.000000
11/24/2010	5:41:05 PM	Bypass solenoid MFC set to  0.000000
11/24/2010	5:41:05 PM	Tube furnace set to 0
11/24/2010	5:41:06 PM	Run finished at 5:41 PM
11/24/2010	5:41:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
